Aluminum-doped zinc oxide ceramics were used to study oxygen self-diffusion by the vapor-solid exchange method. The diffusion profile and the quantitative analysis of impurities (H, Li, and Al) were performed by secondary ion mass spectrometry. The concentrations of Al and H in ZnO were evaluated to be 3.2 × 1019 and below 1.5 × 1017/cm3, respectively. The simultaneous diffusion of oxygen tracer and Li impurity were detected in the analysis, and the diffusion profiles were analyzed to evaluate the diffusion coefficients. Enhanced oxygen diffusivity and increased Li impurity concentration was obtained in Al-doped ZnO. We discuss the defect equations for enhancing oxygen diffusivity and increasing Li concentration in Al-doped ZnO.
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