Single Si crystal 1024 ch MEMS mirror based on terraced electrodes and a high-aspect ratio torsion spring for 3-D cross-connect switch

Renshi Sawada, J. Yamaguchi, E. Higurashi, A. Shimizu, T. Yamamoto, N. Takeuchi, Y. Uenishi

    研究成果: Chapter in Book/Report/Conference proceedingConference contribution

    37 被引用数 (Scopus)

    抄録

    Packaged large scale 1024 ch (32×32) mirror array switch module is presented for an optical cross-connect utilizing two-axis mirrors for beam steering. Besides being small, only 170×130 mm in size, the mirror array features a highly stable switching characteristics because of a tough mirror support and high-aspect-ratio torsion spring, very small warpage of ten nanometer order, and low applied voltage.

    本文言語英語
    ホスト出版物のタイトル2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
    出版社Institute of Electrical and Electronics Engineers Inc.
    ページ11-12
    ページ数2
    ISBN(電子版)0780375955, 9780780375956
    DOI
    出版ステータス出版済み - 1 1 2002
    イベントIEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Lugano, スイス
    継続期間: 8 20 20028 23 2002

    出版物シリーズ

    名前2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

    その他

    その他IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002
    Countryスイス
    CityLugano
    Period8/20/028/23/02

    All Science Journal Classification (ASJC) codes

    • Hardware and Architecture
    • Control and Systems Engineering
    • Electrical and Electronic Engineering
    • Electronic, Optical and Magnetic Materials

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