Smart-Cut Processes for Nanopore Device Formation on SIMOX(100)

Yoshifumi Ikoma; Teruaki Motooka; Shinji Munetoh; Hirofumi Sakita; Hafizal Yahaya; H Naramoto; K Narumi; S Sakai; Y Maeda

Smart-Cut Processes for Nanopore Device Formation on SIMOX(100)

Yoshifumi Ikoma, Teruaki Motooka, Shinji Munetoh, Hirofumi Sakita, Hafizal Yahaya, H Naramoto, K Narumi, S Sakai, Y Maeda

研究成果: Chapter in Book/Report/Conference proceeding › Foreword/postscript

本文言語	英語
ホスト出版物のタイトル	JAEA-Review: JAEA Takasaki Annual Report 2008
出版社	Japan Atomic Energy Agency
ページ	126
ページ数	1
巻	229-041
出版ステータス	出版済み - 12 2009

引用スタイル

Smart-Cut Processes for Nanopore Device Formation on SIMOX(100). / Ikoma, Yoshifumi; Motooka, Teruaki; Munetoh, Shinji; Sakita, Hirofumi; Yahaya, Hafizal; Naramoto, H; Narumi, K; Sakai, S; Maeda, Y.

JAEA-Review: JAEA Takasaki Annual Report 2008. Vol. 229-041 Japan Atomic Energy Agency, 2009. p. 126.

研究成果: Chapter in Book/Report/Conference proceeding › Foreword/postscript

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AU - Ikoma, Yoshifumi

AU - Motooka, Teruaki

AU - Munetoh, Shinji

AU - Sakita, Hirofumi

AU - Yahaya, Hafizal

AU - Naramoto, H

AU - Narumi, K

AU - Sakai, S

AU - Maeda, Y

PY - 2009/12

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M3 - Foreword/postscript

VL - 229-041

SP - 126

BT - JAEA-Review: JAEA Takasaki Annual Report 2008

PB - Japan Atomic Energy Agency

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