Smart-Cut Processes for Nanopore Device Formation on SIMOX(100)

Yoshifumi Ikoma, Teruaki Motooka, Shinji Munetoh, Hirofumi Sakita, Hafizal Yahaya, H Naramoto, K Narumi, S Sakai, Y Maeda

研究成果: Chapter in Book/Report/Conference proceedingForeword/postscript

元の言語英語
ホスト出版物のタイトルJAEA-Review: JAEA Takasaki Annual Report 2008
出版者Japan Atomic Energy Agency
ページ126
ページ数1
229-041
出版物ステータス出版済み - 12 2009

これを引用

Ikoma, Y., Motooka, T., Munetoh, S., Sakita, H., Yahaya, H., Naramoto, H., Narumi, K., Sakai, S., & Maeda, Y. (2009). Smart-Cut Processes for Nanopore Device Formation on SIMOX(100). : JAEA-Review: JAEA Takasaki Annual Report 2008 (巻 229-041, pp. 126). Japan Atomic Energy Agency.