Smart-Cut Processes for Nanopore Device Formation on SIMOX(100)

Yoshifumi Ikoma; Teruaki Motooka; Shinji Munetoh; Hirofumi Sakita; Hafizal Yahaya; H Naramoto; K Narumi; S Sakai; Y Maeda

Smart-Cut Processes for Nanopore Device Formation on SIMOX(100)

Yoshifumi Ikoma, Teruaki Motooka, Shinji Munetoh, Hirofumi Sakita, Hafizal Yahaya, H Naramoto, K Narumi, S Sakai, Y Maeda

材料機能工学

研究成果: Chapter in Book/Report/Conference proceeding › Foreword/postscript

元の言語	英語
ホスト出版物のタイトル	JAEA-Review: JAEA Takasaki Annual Report 2008
出版者	Japan Atomic Energy Agency
ページ	126
ページ数	1
巻	229-041
出版物ステータス	出版済み - 12 2009

これを引用

Ikoma, Y., Motooka, T., Munetoh, S., Sakita, H., Yahaya, H., Naramoto, H., Narumi, K., Sakai, S., & Maeda, Y. (2009). Smart-Cut Processes for Nanopore Device Formation on SIMOX(100). ： JAEA-Review: JAEA Takasaki Annual Report 2008 (巻 229-041, pp. 126). Japan Atomic Energy Agency.

Smart-Cut Processes for Nanopore Device Formation on SIMOX(100). / Ikoma, Yoshifumi; Motooka, Teruaki; Munetoh, Shinji; Sakita, Hirofumi; Yahaya, Hafizal; Naramoto, H; Narumi, K; Sakai, S; Maeda, Y.

JAEA-Review: JAEA Takasaki Annual Report 2008. 巻 229-041 Japan Atomic Energy Agency, 2009. p. 126.

研究成果: Chapter in Book/Report/Conference proceeding › Foreword/postscript

@inbook{9610e320f91248f9acad8ada78f630ee,

title = "Smart-Cut Processes for Nanopore Device Formation on SIMOX(100)",

author = "Yoshifumi Ikoma and Teruaki Motooka and Shinji Munetoh and Hirofumi Sakita and Hafizal Yahaya and H Naramoto and K Narumi and S Sakai and Y Maeda",

year = "2009",

month = dec,

language = "English",

volume = "229-041",

pages = "126",

booktitle = "JAEA-Review: JAEA Takasaki Annual Report 2008",

publisher = "Japan Atomic Energy Agency",

}

TY - CHAP

T1 - Smart-Cut Processes for Nanopore Device Formation on SIMOX(100)

AU - Ikoma, Yoshifumi

AU - Motooka, Teruaki

AU - Munetoh, Shinji

AU - Sakita, Hirofumi

AU - Yahaya, Hafizal

AU - Naramoto, H

AU - Narumi, K

AU - Sakai, S

AU - Maeda, Y

PY - 2009/12

Y1 - 2009/12

M3 - Foreword/postscript

VL - 229-041

SP - 126

BT - JAEA-Review: JAEA Takasaki Annual Report 2008

PB - Japan Atomic Energy Agency

ER -