Solid-state electrochemical micromachining

Kai Kamada, Kazuyoshi Izawa, Yuko Tsutsumi, Shuichi Yamashita, Naoya Enomoto, Junichi Hojo, Yasumichi Matsumoto

    研究成果: Contribution to journalArticle査読

    8 被引用数 (Scopus)

    抄録

    An approach for solid-state micromachining using an anodic electrochemical reaction at the microcontact between the ion conducting microelectrode and metal substrate was proposed. The method called solid-state electrochemical micromachining (SSEM), can control the machining size and depth by adjusting the contact area or other EM parameters. Scanning the microelectrode under an applied electric field results in a fine-patterned surface. The metal surface can be directly patterned in almost any configuration desired, since it is a solid-state process that do not require any solutions.

    本文言語英語
    ページ(範囲)1930-1932
    ページ数3
    ジャーナルChemistry of Materials
    17
    8
    DOI
    出版ステータス出版済み - 4 19 2005

    All Science Journal Classification (ASJC) codes

    • 化学 (全般)
    • 化学工学(全般)
    • 材料化学

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