An approach for solid-state micromachining using an anodic electrochemical reaction at the microcontact between the ion conducting microelectrode and metal substrate was proposed. The method called solid-state electrochemical micromachining (SSEM), can control the machining size and depth by adjusting the contact area or other EM parameters. Scanning the microelectrode under an applied electric field results in a fine-patterned surface. The metal surface can be directly patterned in almost any configuration desired, since it is a solid-state process that do not require any solutions.
!!!All Science Journal Classification (ASJC) codes
- 化学 (全般)