Spectral dynamics of narrow-band F2 laser for optical lithography

H. Tanaka, A. Takahashi, T. Okada, T. Ariga, R. Nohdomi, K. Hotta, H. Mizoguchi

研究成果: Contribution to journalArticle査読

2 被引用数 (Scopus)

抄録

We describe the spectral dynamics of a line-narrowed F2 laser, based on numerical simulation by a newly developed simulation code. The results were compared with the experimental results and it was found that the code could predict well the performance of a line-narrowed operation of the F2 laser. The code was also used to obtain a guideline for the optimized operation of an injection-seeded F2 laser system. In addition, a new spectral narrowing technique for the F2 laser has been proposed and its effectiveness was evaluated by the simulation code.

本文言語英語
ページ(範囲)735-740
ページ数6
ジャーナルApplied Physics B: Lasers and Optics
76
7
DOI
出版ステータス出版済み - 7 1 2003

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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