Spin-coated indium oxide thin film on alumina and silicon substrates and their gas sensing properties

Wan Young Chung, Go Sakai, Kengo Shimanoe, Norio Miura, Duk Dong Lee, Noboru Yamazoe

研究成果: Contribution to journalConference article査読

18 被引用数 (Scopus)

抄録

Thin films of indium oxide were prepared on alumina and silicon substrates by spin-coating from an aqueous acetic acid solution dissolving In(OH)3 and ammonium carboxymethyl cellulose. The films could cover well the large grains of rough alumina as well as the flat surface of silicon. By changing the number of spin-coating, the film thickness was well controlled between 70 nm and 210 nm on alumina or between 65 nm and 220 nm on silicon, as observed by cross-sectional FE-SEM. Gas sensing properties including sensitivity, selectivity and the rates of response and recovery were strongly dependent on the kind of substrate, film thickness and operating temperature.

本文言語英語
ページ(範囲)312-315
ページ数4
ジャーナルSensors and Actuators, B: Chemical
65
1
DOI
出版ステータス出版済み - 6 30 2000
イベントIMCS-7: 7th International Meeting on Chemical Sensors - Beijing, China
継続期間: 7 27 19987 30 1998

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学
  • 材料化学

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