Spin-coated indium oxide thin film on alumina and silicon substrates and their gas sensing properties

Wan Young Chung, Go Sakai, Kengo Shimanoe, Norio Miura, Duk Dong Lee, Noboru Yamazoe

研究成果: ジャーナルへの寄稿Conference article

18 引用 (Scopus)

抄録

Thin films of indium oxide were prepared on alumina and silicon substrates by spin-coating from an aqueous acetic acid solution dissolving In(OH)3 and ammonium carboxymethyl cellulose. The films could cover well the large grains of rough alumina as well as the flat surface of silicon. By changing the number of spin-coating, the film thickness was well controlled between 70 nm and 210 nm on alumina or between 65 nm and 220 nm on silicon, as observed by cross-sectional FE-SEM. Gas sensing properties including sensitivity, selectivity and the rates of response and recovery were strongly dependent on the kind of substrate, film thickness and operating temperature.

元の言語英語
ページ(範囲)312-315
ページ数4
ジャーナルSensors and Actuators, B: Chemical
65
発行部数1
DOI
出版物ステータス出版済み - 6 30 2000
イベントIMCS-7: 7th International Meeting on Chemical Sensors - Beijing, China
継続期間: 7 27 19987 30 1998

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Aluminum Oxide
Silicon
indium oxides
Indium
Oxide films
Alumina
aluminum oxides
Gases
Spin coating
Thin films
Film thickness
coating
silicon
film thickness
Substrates
thin films
gases
Carboxymethylcellulose Sodium
operating temperature
Ammonium Compounds

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

これを引用

Spin-coated indium oxide thin film on alumina and silicon substrates and their gas sensing properties. / Chung, Wan Young; Sakai, Go; Shimanoe, Kengo; Miura, Norio; Lee, Duk Dong; Yamazoe, Noboru.

:: Sensors and Actuators, B: Chemical, 巻 65, 番号 1, 30.06.2000, p. 312-315.

研究成果: ジャーナルへの寄稿Conference article

Chung, Wan Young ; Sakai, Go ; Shimanoe, Kengo ; Miura, Norio ; Lee, Duk Dong ; Yamazoe, Noboru. / Spin-coated indium oxide thin film on alumina and silicon substrates and their gas sensing properties. :: Sensors and Actuators, B: Chemical. 2000 ; 巻 65, 番号 1. pp. 312-315.
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AU - Yamazoe, Noboru

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AB - Thin films of indium oxide were prepared on alumina and silicon substrates by spin-coating from an aqueous acetic acid solution dissolving In(OH)3 and ammonium carboxymethyl cellulose. The films could cover well the large grains of rough alumina as well as the flat surface of silicon. By changing the number of spin-coating, the film thickness was well controlled between 70 nm and 210 nm on alumina or between 65 nm and 220 nm on silicon, as observed by cross-sectional FE-SEM. Gas sensing properties including sensitivity, selectivity and the rates of response and recovery were strongly dependent on the kind of substrate, film thickness and operating temperature.

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