Spin-coated thin films of SiO2-WO3 composites for detection of sub-ppm NO2

Xusheng Wang, Go Sakai, Kengo Shimanoe, Norio Miura, Noboru Yamazoe

研究成果: Contribution to journalArticle査読

67 被引用数 (Scopus)

抄録

Thin films of SiO2-WO3 composites with various SiO2 contents (0-20 wt%) were prepared by means of sol-gel method. The grain size of WO3 decreased with increasing SiO2 content, resulting in an increase in NO2 sensitivity. On the other hand, the response transient to NO2 was brought to be the quickest at 5% SiO2. The thin film of SiO2(5%)-WO3 was far more sensitive to NO2 than the thin film or sintered block of pure WO3. It could detect dilute NO2 (0.1-2 ppm) in air at 350°C sensitively and fairly selectively. The NO2 sensing characteristics were stable over the whole test period of 10 days.

本文言語英語
ページ(範囲)141-146
ページ数6
ジャーナルSensors and Actuators, B: Chemical
45
2
DOI
出版ステータス出版済み - 12 1 1997

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学
  • 材料化学

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