Sterilization characteristics and material compatibility of low-pressure RF oxygen plasma sterilization method for dental instruments are investigated. Regarding the characteristics of the plasma sterilizer for dental instruments, it is small and can rapidly sterilize owing to a narrow gap discharge. Sterilization of vial-type biological indicators is achieved for the shortest treatment period of 40 min at an RF power of 80 W at a temperature of 70 °C. At a temperature lower than 60 °C, a sterilization period of 90 min is required using a water-cooled electrode. No surface modifications of dental instruments such as chemical composition and deterioration of fine crystals of a diamond bar were observed under a scanning electron microscope.
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