Strength evaluation of polycrystalline silicon structure considering sidewall morphology

S. Hamada, Y. Sugimoto

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

In order to evaluate strength of micron size polycrystalline silicon (poly-Si) structure for MEMS considering surface morphology difference between top and sidewall and effective surface area, bending strength tests of cantilever beam, surface roughness measurement and fracture surface analysis are performed. The specimens are made by CVD process for poly-Si deposition and deep RIE process for sidewall formation, and then the surface morphology of the top and the sidewall surface are different. The various size notches on the specimen are introduced in order to change effective surface area. By the fracture surface analysis, it was found that the fracture initiation point was not always maximum stress point; this is because there exist stress concentration on the surface. Surface roughness was measured using atomic force microscope (AFM). Then the maximum stress concentration of the specimen on the top and the sidewall surface respectively were presumed using extreme statistics, and effective surface area was defined. Then, bending strength and effective surface area shows good correlation.

元の言語英語
ホスト出版物のタイトル12th International Conference on Fracture 2009, ICF-12
ページ4249-4258
ページ数10
出版物ステータス出版済み - 12 1 2009
イベント12th International Conference on Fracture 2009, ICF-12 - Ottawa, ON, カナダ
継続期間: 7 12 20097 17 2009

出版物シリーズ

名前12th International Conference on Fracture 2009, ICF-12
6

その他

その他12th International Conference on Fracture 2009, ICF-12
カナダ
Ottawa, ON
期間7/12/097/17/09

Fingerprint

Polysilicon
silicon
surface area
Surface analysis
surface roughness
Bending strength
Surface morphology
Stress concentration
Surface roughness
fracture initiation
Roughness measurement
Surface measurement
Reactive ion etching
Cantilever beams
evaluation
MEMS
Chemical vapor deposition
Microscopes
Statistics

All Science Journal Classification (ASJC) codes

  • Geotechnical Engineering and Engineering Geology

これを引用

Hamada, S., & Sugimoto, Y. (2009). Strength evaluation of polycrystalline silicon structure considering sidewall morphology. : 12th International Conference on Fracture 2009, ICF-12 (pp. 4249-4258). (12th International Conference on Fracture 2009, ICF-12; 巻数 6).

Strength evaluation of polycrystalline silicon structure considering sidewall morphology. / Hamada, S.; Sugimoto, Y.

12th International Conference on Fracture 2009, ICF-12. 2009. p. 4249-4258 (12th International Conference on Fracture 2009, ICF-12; 巻 6).

研究成果: 著書/レポートタイプへの貢献会議での発言

Hamada, S & Sugimoto, Y 2009, Strength evaluation of polycrystalline silicon structure considering sidewall morphology. : 12th International Conference on Fracture 2009, ICF-12. 12th International Conference on Fracture 2009, ICF-12, 巻. 6, pp. 4249-4258, 12th International Conference on Fracture 2009, ICF-12, Ottawa, ON, カナダ, 7/12/09.
Hamada S, Sugimoto Y. Strength evaluation of polycrystalline silicon structure considering sidewall morphology. : 12th International Conference on Fracture 2009, ICF-12. 2009. p. 4249-4258. (12th International Conference on Fracture 2009, ICF-12).
Hamada, S. ; Sugimoto, Y. / Strength evaluation of polycrystalline silicon structure considering sidewall morphology. 12th International Conference on Fracture 2009, ICF-12. 2009. pp. 4249-4258 (12th International Conference on Fracture 2009, ICF-12).
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