TY - JOUR
T1 - Structural and compositional characterization of N 2 -H 2 plasma surface-treated TiO 2 thin films
AU - Miao, L.
AU - Tanemura, S.
AU - Watanabe, H.
AU - Toh, S.
AU - Kaneko, K.
N1 - Funding Information:
This work is partly supported by grants from the NITECH 21st Century COE program for “World Ceramics Center for Environmental Harmony”. A part of this work is supported by “Nanotechnology Support Project” of the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan.
PY - 2005/5/15
Y1 - 2005/5/15
N2 - The structural and compositional properties of three samples such as as-deposited single-phase anatase-TiO 2 polycrystalline thin films on slide glass substrates (No. 1), the sample surface-treated by N 2 -H 2 mixed-gases plasma (No. 2), and the sample being additionally anneal-treated in N 2 gases (No. 3), are characterized by transmission electron microscopy (TEM) and energy dispersive X-ray spectroscopy (EDS). The primitive lattice cells of three thin films are verified as distorted in comparison with that of bulk from the TEM results. This distortion of primitive lattice cell causes the increase of optical band gap for the films when we compared it with that of bulk, while the decrease of optical band gap should be attributed to the substitution of N into TiO 2 . Higher concentration of nitrogen in sample No. 3 is confirmed by line-EDS profiles under scanning TEM (STEM) when compared with sample No. 2 and this confirms that plasma surface treatment is an effective way for N-doping in TiO 2 .
AB - The structural and compositional properties of three samples such as as-deposited single-phase anatase-TiO 2 polycrystalline thin films on slide glass substrates (No. 1), the sample surface-treated by N 2 -H 2 mixed-gases plasma (No. 2), and the sample being additionally anneal-treated in N 2 gases (No. 3), are characterized by transmission electron microscopy (TEM) and energy dispersive X-ray spectroscopy (EDS). The primitive lattice cells of three thin films are verified as distorted in comparison with that of bulk from the TEM results. This distortion of primitive lattice cell causes the increase of optical band gap for the films when we compared it with that of bulk, while the decrease of optical band gap should be attributed to the substitution of N into TiO 2 . Higher concentration of nitrogen in sample No. 3 is confirmed by line-EDS profiles under scanning TEM (STEM) when compared with sample No. 2 and this confirms that plasma surface treatment is an effective way for N-doping in TiO 2 .
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U2 - 10.1016/j.apsusc.2004.10.098
DO - 10.1016/j.apsusc.2004.10.098
M3 - Conference article
AN - SCOPUS:15844366618
VL - 244
SP - 412
EP - 417
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
IS - 1-4
T2 - 12th International Conference on Solid Films and Surfaces
Y2 - 21 June 2004 through 25 June 2004
ER -