Structural Change in Si Induced by Ion Bombardments and Its Application for Nano-Fabrication

Yoshifumi Ikoma, Teruaki Motooka, Shinji Munetoh, X. Q. Cheng, H Naramoto, K Narumi, S Sakai, Y. Maeda

研究成果: Chapter in Book/Report/Conference proceeding › Foreword/postscript

本文言語	英語
ホスト出版物のタイトル	JAEA-Review: JAEA Takasaki annual report 2006
ページ	169
巻	2007-060
出版ステータス	出版済み - 3 2008

引用スタイル

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title = "Structural Change in Si Induced by Ion Bombardments and Its Application for Nano-Fabrication",

author = "Yoshifumi Ikoma and Teruaki Motooka and Shinji Munetoh and Cheng, {X. Q.} and H Naramoto and K Narumi and S Sakai and Y. Maeda",

year = "2008",

month = mar,

language = "English",

volume = "2007-060",

pages = "169",

booktitle = "JAEA-Review: JAEA Takasaki annual report 2006",

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TY - CHAP

T1 - Structural Change in Si Induced by Ion Bombardments and Its Application for Nano-Fabrication

AU - Ikoma, Yoshifumi

AU - Motooka, Teruaki

AU - Munetoh, Shinji

AU - Cheng, X. Q.

AU - Naramoto, H

AU - Narumi, K

AU - Sakai, S

AU - Maeda, Y.

PY - 2008/3

Y1 - 2008/3

M3 - Foreword/postscript

VL - 2007-060

SP - 169

BT - JAEA-Review: JAEA Takasaki annual report 2006

ER -