Structural Change in Si Induced by Ion Bombardments and Its Application for Nano-Fabrication

Yoshifumi Ikoma, Teruaki Motooka, Shinji Munetoh, X. Q. Cheng, H Naramoto, K Narumi, S Sakai, Y. Maeda

研究成果: 著書/レポートタイプへの貢献前書き/後書き

元の言語英語
ホスト出版物のタイトルJAEA-Review: JAEA Takasaki annual report 2006
ページ169
2007-060
出版物ステータス出版済み - 3 2008

これを引用

Ikoma, Y., Motooka, T., Munetoh, S., Cheng, X. Q., Naramoto, H., Narumi, K., ... Maeda, Y. (2008). Structural Change in Si Induced by Ion Bombardments and Its Application for Nano-Fabrication. : JAEA-Review: JAEA Takasaki annual report 2006 (巻 2007-060, pp. 169)

Structural Change in Si Induced by Ion Bombardments and Its Application for Nano-Fabrication. / Ikoma, Yoshifumi; Motooka, Teruaki; Munetoh, Shinji; Cheng, X. Q. ; Naramoto, H; Narumi, K; Sakai, S; Maeda, Y.

JAEA-Review: JAEA Takasaki annual report 2006. 巻 2007-060 2008. p. 169.

研究成果: 著書/レポートタイプへの貢献前書き/後書き

Ikoma, Y, Motooka, T, Munetoh, S, Cheng, XQ, Naramoto, H, Narumi, K, Sakai, S & Maeda, Y 2008, Structural Change in Si Induced by Ion Bombardments and Its Application for Nano-Fabrication. : JAEA-Review: JAEA Takasaki annual report 2006. 巻. 2007-060, pp. 169.
Ikoma Y, Motooka T, Munetoh S, Cheng XQ, Naramoto H, Narumi K その他. Structural Change in Si Induced by Ion Bombardments and Its Application for Nano-Fabrication. : JAEA-Review: JAEA Takasaki annual report 2006. 巻 2007-060. 2008. p. 169
Ikoma, Yoshifumi ; Motooka, Teruaki ; Munetoh, Shinji ; Cheng, X. Q. ; Naramoto, H ; Narumi, K ; Sakai, S ; Maeda, Y. / Structural Change in Si Induced by Ion Bombardments and Its Application for Nano-Fabrication. JAEA-Review: JAEA Takasaki annual report 2006. 巻 2007-060 2008. pp. 169
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title = "Structural Change in Si Induced by Ion Bombardments and Its Application for Nano-Fabrication",
author = "Yoshifumi Ikoma and Teruaki Motooka and Shinji Munetoh and Cheng, {X. Q.} and H Naramoto and K Narumi and S Sakai and Y. Maeda",
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T1 - Structural Change in Si Induced by Ion Bombardments and Its Application for Nano-Fabrication

AU - Ikoma, Yoshifumi

AU - Motooka, Teruaki

AU - Munetoh, Shinji

AU - Cheng, X. Q.

AU - Naramoto, H

AU - Narumi, K

AU - Sakai, S

AU - Maeda, Y.

PY - 2008/3

Y1 - 2008/3

M3 - Foreword/postscript

VL - 2007-060

SP - 169

BT - JAEA-Review: JAEA Takasaki annual report 2006

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