YBa2Cu3Ox films on low-misfit LaxNd1-xGaO3 (110) substrates grown by liquid phase epitaxy (LPE) are investigated in the as-grown state by X-ray diffraction, polarized optical microscopy, atomic force microscopy (AFM), and transmission electron microscopy (TEM). The preferred orientation axis of the film normal to the substrate surface is the a-/b-axis with twins, as observed by θ/2θ-scan, polarized optical micrographs, and cross-sectional view TEM images. In-plane alignment of the c-axis in the films is confirmed by X-ray φ-scan and plane-view TEM images. Defects running perpendicular to the c-axis direction were clearly observed in the plane-view TEM images. These defects consist of excess CuO chains localized in the BaO-BaO interlayers forming (CuO)n layers, similar to that in Y2Ba4Cu8Ox (248 phase).
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