Study on electron density dependence of metastable Ar+ density in pulsed-discharge plasma by using LIF method

Yukio Watanabe, Masaharu Shiratani, Sukeomi Ogi, Naoki Kunihiro

研究成果: ジャーナルへの寄稿学術誌査読

1 被引用数 (Scopus)

抄録

The dependence of the Ar+ metastable density nd(3d4F7/2) on the electron density ne and its radial profile were studied in the range ne=1014∼1015 cm-3 by using the LIF method in an Ar pulsed-discharge plasma. The measured LIF intensity was strongly affected by electron collisional quenching. The corrected LIF intensity was proportional to both the n(3d4F7/2) estimated by a C–R model and the measured ne. Its radial profile agrees fairly well with the ne measured by a double-probe.

本文言語英語
ページ(範囲)184-185
ページ数2
ジャーナルJapanese journal of applied physics
26
1 R
DOI
出版ステータス出版済み - 1月 1987

!!!All Science Journal Classification (ASJC) codes

  • 工学(全般)
  • 物理学および天文学(全般)

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