Study on the response and recovery properties of semiconductor gas sensors using a high-speed gas-switching system

Tetsuya Kida, Toru Kuroiwa, Masayoshi Yuasa, Kengo Shimanoe, Noboru Yamazoe

研究成果: ジャーナルへの寄稿記事

33 引用 (Scopus)

抄録

A high-speed gas-switching system, in which a low-dead volume chamber (0.6 cm3) was connected to a gas flow apparatus equipped with a high-speed gas-switching valve operative at a rate of 30 ms, was designed to investigate the real response and recovery properties of semiconductor gas sensors. The developed system allowed rapid replacement of the gas atmosphere in the chamber where a gas sensor device was placed within 0.3 s. It was revealed that the response speed of the sensor device based on a SnO2 porous film (pore size at maximum population: 37 nm) was remarkably fast, reaching a response time of less than 1 s for H2 and CO detection at 250 and 350 °C. This suggests that the diffusion and surface reaction of H2 and CO are quite fast in the porous film. On the other hand, the recovery speed was not comparably fast and the resistance of the device did not recover to the original state within 20 s after switching the gas atmosphere in the chamber from the sample gases to air. This is possibly due to the slow desorption of the H2O and CO2 that were formed by the surface reaction of H2 and CO, respectively with the adsorbed oxygen on SnO2.

元の言語英語
ページ(範囲)928-933
ページ数6
ジャーナルSensors and Actuators, B: Chemical
134
発行部数2
DOI
出版物ステータス出版済み - 9 25 2008

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Switching systems
Chemical sensors
Gases
recovery
high speed
Semiconductor materials
Recovery
Carbon Monoxide
sensors
gases
Surface reactions
chambers
surface reactions
atmospheres
Pore size
Flow of gases
Desorption
Oxygen
gas flow
Sensors

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

これを引用

Study on the response and recovery properties of semiconductor gas sensors using a high-speed gas-switching system. / Kida, Tetsuya; Kuroiwa, Toru; Yuasa, Masayoshi; Shimanoe, Kengo; Yamazoe, Noboru.

:: Sensors and Actuators, B: Chemical, 巻 134, 番号 2, 25.09.2008, p. 928-933.

研究成果: ジャーナルへの寄稿記事

Kida, Tetsuya ; Kuroiwa, Toru ; Yuasa, Masayoshi ; Shimanoe, Kengo ; Yamazoe, Noboru. / Study on the response and recovery properties of semiconductor gas sensors using a high-speed gas-switching system. :: Sensors and Actuators, B: Chemical. 2008 ; 巻 134, 番号 2. pp. 928-933.
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