Submicroscale flow sensor employing suspended hot film with carbon nanotube fins

Yohei Ito, Taku Higuchi, Koji Takahashi

研究成果: Contribution to journalArticle査読

12 被引用数 (Scopus)

抄録

A submicroscale flow sensor has been developed that consists of a suspended hot film and carbon nanotube (CNT) fins. Flow measurement experiments, together with a theoretical model, revealed the advantages of the use of CNT fins. The suspended metal film reduces heat loss and the CNT fins enhance the heat transfer to the fluid flow. Herein, the working principle of the CNT fins is presented in detail, together with a description of the micro electro mechanical systems (MEMS)/nano electro mechanical systems (NEMS) techniques used to fabricate the sensor. The CNTs were deposited by a manipulation method that is based on dielectrophoresis.

本文言語英語
ページ(範囲)51-60
ページ数10
ジャーナルJournal of Thermal Science and Technology
5
1
DOI
出版ステータス出版済み - 2010

All Science Journal Classification (ASJC) codes

  • 原子分子物理学および光学
  • 材料科学(全般)
  • 器械工学
  • 工学(その他)

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