We have successfully fabricated YBa2Cu3Oy (Y123) and GdBa2Cu3Oy (Gd123) films on SrTiO3 substrates by the ex situ heat treatment of co-evaporated Y-BaF2-Cu and Gd-BaF2-Cu precursor films prepared by electron beam deposition technique without water vapor. Tc and Jc of the Y123 film were 91.6 K and 0.95 MA cm-2 at 77 K at self-field, respectively. The Gd123 film showed Tc of 93.4 K and Jc of 1.5 MA cm-2 at 77 K at self-field. It was found that the surface morphology of the Y123 and the Gd123 films depended on the partial oxygen pressure during the heat treatment.
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