Synthesis of Al2O3 coatings on Ti(C, N)-based cermets by microwave plasma CVD using Al(acac)3

Rong Tu, Yang Yuan, Litong Guo, Jun Li, Song Zhang, Meijun Yang, Qizhong Li, Lianmeng Zhang, Takashi Goto, Hitoshi Ohmori, Ji Shi, Haiwen Li

研究成果: Contribution to journalArticle査読

1 被引用数 (Scopus)

抄録

Aluminum acetylacetonate (Al(acac)3) was used as a precursor to synthesize aluminum oxide (Al2O3) coatings on Ti(C, N)-based ceramic by microwave plasma CVD (MPCVD). Al2O3 coatings transformed from γ phase to δ phase and α phase and as microwave power (pM) and total pressure (Ptot) increased. The effects of pM and Ptot on the microstructure of the Al2O3 coating and oxidation of the substrate have been investigated. The relationship between phase structure and adhesive strength of the coatings was also studied. Coatings deposited at pM = 1.0-1.2 kW and Ptot = 400 Pa exhibited good adhesion strength (Class 1).

本文言語英語
ページ(範囲)2265-2272
ページ数8
ジャーナルInternational Journal of Applied Ceramic Technology
16
6
DOI
出版ステータス出版済み - 11 1 2019

All Science Journal Classification (ASJC) codes

  • セラミックおよび複合材料
  • 凝縮系物理学
  • マーケティング
  • 材料化学

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