Aluminum acetylacetonate (Al(acac)3) was used as a precursor to synthesize aluminum oxide (Al2O3) coatings on Ti(C, N)-based ceramic by microwave plasma CVD (MPCVD). Al2O3 coatings transformed from γ phase to δ phase and α phase and as microwave power (pM) and total pressure (Ptot) increased. The effects of pM and Ptot on the microstructure of the Al2O3 coating and oxidation of the substrate have been investigated. The relationship between phase structure and adhesive strength of the coatings was also studied. Coatings deposited at pM = 1.0-1.2 kW and Ptot = 400 Pa exhibited good adhesion strength (Class 1).
|ジャーナル||International Journal of Applied Ceramic Technology|
|出版ステータス||出版済み - 11 1 2019|
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