In this study, platinum (Pt) nanodots with diameters of 73-142nm were prepared using organ-metal solutions on silicon substrates by a heating process. The influence of heating conditions such as heating temperature and ambient gas pressure on the structural properties of the Pt nanodots was investigated. The size and shape of the Pt nanodots were measured using scanning electron microscopy and image analysis software. The results suggest that the diameter and shape of the Pt nanodots can be controlled by heating temperature. In addition, X-ray diffraction and X-ray photoelectron spectroscopy measurement results suggest that the crystallinity and atomic composition of the Pt nanodots can also be controlled by varying ambient gas pressure. Changing the ambient gas pressure while maintaining a constant temperature affected the growth of Pt and platinum silicide (PtSi) crystals in the Pt nanodots. Under atmospheric pressure and an ambient Ar pressure of 5000 Pa, a single Pt crystal was formed in the Pt nanodots. On the other hand, under low vacuum and an ambient Ar pressure of 700 Pa, Pt and PtSi crystals coexisted in the Pt nanodots.
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