Synthesizing SnO2 thin films and characterizing sensing performances

Takeshi Ohgaki, Ryota Matsuoka, Ken Watanabe, Kenji Matsumoto, Yutaka Adachi, Isao Sakaguchi, Shunichi Hishita, Naoki Ohashi, Hajime Haneda

研究成果: Contribution to journalArticle査読

39 被引用数 (Scopus)

抄録

SnO2 thin films were grown on silica glass substrates using the pulsed laser deposition (PLD) method, and their structures, electric properties, and sensor performances were examined to investigate the sensing mechanism of thin-film gas sensors. Single-phase SnO2 films with rutile-type structures were obtained at 650 °C. All the SnO2 films had many columnar grains, and the grain size increased with film thickness. Measurements of the Hall coefficient at room temperature revealed that the Hall mobility of the films was independent of the film thickness. In contrast, the sensing performances of the films for NO2 and H2 gases respectively in an air atmosphere drastically improved for film thicknesses under 100 nm. These results for the film properties and sensing performances of SnO2 thin films are discussed in terms of a space-charge layer formed on the columnar grains.

本文言語英語
ページ(範囲)99-104
ページ数6
ジャーナルSensors and Actuators, B: Chemical
150
1
DOI
出版ステータス出版済み - 10 21 2010
外部発表はい

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学
  • 材料化学

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