Technology for MEMS commercialization: Current status and future prospects

Renshi Sawada, Eiji Higurashi

研究成果: ジャーナルへの寄稿 › 総説 › 査読

本文言語	英語
ページ（範囲）	491-497
ページ数	7
ジャーナル	Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
巻	76
号	5
DOI	https://doi.org/10.2493/jjspe.76.491
出版ステータス	出版済み - 5月 2010

!!!All Science Journal Classification (ASJC) codes

@article{91ff8f365fa74c0587ff23d25964418f,

title = "Technology for MEMS commercialization: Current status and future prospects",

author = "Renshi Sawada and Eiji Higurashi",

year = "2010",

month = may,

doi = "10.2493/jjspe.76.491",

language = "English",

volume = "76",

pages = "491--497",

journal = "Journal of the Japan Society for Precision Engineering",

issn = "0912-0289",

publisher = "Japan Society for Precision Engineering",

number = "5",

}

TY - JOUR

T1 - Technology for MEMS commercialization

T2 - Current status and future prospects

AU - Sawada, Renshi

AU - Higurashi, Eiji

PY - 2010/5

Y1 - 2010/5

UR - http://www.scopus.com/inward/record.url?scp=77955457245&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77955457245&partnerID=8YFLogxK

U2 - 10.2493/jjspe.76.491

DO - 10.2493/jjspe.76.491

M3 - Review article

AN - SCOPUS:77955457245

SN - 0912-0289

VL - 76

SP - 491

EP - 497

JO - Journal of the Japan Society for Precision Engineering

JF - Journal of the Japan Society for Precision Engineering

IS - 5

ER -