The development of a multielectrode array is the key issue for retinal prostheses. We developed a 10 × 10 platinum electrode array that consists of an 8-μm polyimide layer sandwiched between 5-μm polymonochloro-para- xylylene (parylene-C) layers. Each electrode was formed as a 30-μm-high bump by Pt/Au double-layer electroplating. We estimated the charge delivery capability (CDC) of the electrode by measuring the CDCs of two-channel electrode arrays. The dimensions of each electrode of the two-channel array were the same as those of each electrode formed on the 10 × 10 array. The results suggest that for cathodic-first (CF) pulses, 80% of electrodes surpassed our development target of 318 μC/cm2, which corresponds to the charge density of pulses of 500 μs duration and 200 μA amplitude for a 200-μm-diameter planar electrode.
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