The effect of the laser beam wavelength and pulse width on micro grooving: Comparison of nanosecond and femtosecond laser

Shinri Nonaka, Tastuhiro Mori, Yasuyuki Takata, Masamichi Kohno

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

Processing technique of micro grooves and channels is very important to study the phenomenon of fluids in micro scale. Micro grooves and microchannels play an important role in various devices, such as μ-TAS (Micro-Total Analysis Systems) and micro reactors. Laser processing is currently widely used for drilling and grooving of various materials including metals, polymers, glasses and composite materials, since laser machining can avoid the problems that conventional machining methods have. For example wear of a working tool, lowering of processing accuracy, and wear debris becoming contaminants are some of the problems of the conventional method. Additionally, compared to other non-contact machining processes such as electron beam machining (EBM) and focused ion beam (FIB), machining a vacuum is not required. Therefore, applicability is wider and setup costs can be more economical.

本文言語英語
ホスト出版物のタイトルASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conference and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012
ページ275-280
ページ数6
DOI
出版ステータス出版済み - 12 1 2012
イベントASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels, ICNMM 2012 Collocated with the ASME 2012 Heat Transfer Summer Conf. and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012 - Rio Grande, プエルトリコ
継続期間: 7 8 20127 12 2012

出版物シリーズ

名前ASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conf. and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012

その他

その他ASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels, ICNMM 2012 Collocated with the ASME 2012 Heat Transfer Summer Conf. and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012
Countryプエルトリコ
CityRio Grande
Period7/8/127/12/12

All Science Journal Classification (ASJC) codes

  • Process Chemistry and Technology

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