Theoretical analyses of in incorporation and compositional instability in coherently grown InGaN thin films

Tomoe Yayama, Yoshihiro Kangawa, Koichi Kakimoto, Akinori Koukitu

研究成果: Contribution to journalConference article査読

19 被引用数 (Scopus)

抄録

We performed thermodynamic analyses to calculate the relationship between the input indium molar ratio and solid composition of a coherently grown InGaN thin film that is subjected compressive or tensile stress. The theoretical approach incorporates energy loss of a thin film system due to lattice constraint from the substrate. The results show that the indium composition x of coherently grown InGaN is lower than that of stress-free InGaN. This represents the composition pulling effect. We also studied stable growth modes under various growth conditions. The results suggest the importance of control of partial pressure of NH3 to optimize growth conditions of InGaN with a unique composition.

本文言語英語
ページ(範囲)2249-2251
ページ数3
ジャーナルPhysica Status Solidi (C) Current Topics in Solid State Physics
7
7-8
DOI
出版ステータス出版済み - 2010
イベント8th International Conference on Nitride Semiconductors, ICNS-8 - Jeju, 大韓民国
継続期間: 10 18 200910 23 2009

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics

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