Theory for correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas

Masaharu Shiratani, Kazunori Koga, Kunihiro Kamataki, Shinya Iwashita, Giichiro Uchida, Hyunwoong Seo, Naho Itagaki

研究成果: ジャーナルへの寄稿学術誌査読

10 被引用数 (Scopus)

抄録

We propose a simple theoretical model that describes the correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas. The model predicts that the high density of nanoparticles brings about small mean size, narrow size dispersion, and sharp size slope on the large side of the size distribution. The model suggests some methods of tuning the size dispersion, and it also suggests that a self-limiting process is the key to markedly suppressing fluctuations in nanostructure fabrication. All predictions coincide with the experimental results reported previously. Moreover, the model suggests that plasma fluctuation induces both the linear and nonlinear responses of nanoparticle growth.

本文言語英語
論文番号010201
ジャーナルJapanese journal of applied physics
53
1
DOI
出版ステータス出版済み - 1月 2014

!!!All Science Journal Classification (ASJC) codes

  • 工学(全般)
  • 物理学および天文学(全般)

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