TY - JOUR
T1 - Theory for correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas
AU - Shiratani, Masaharu
AU - Koga, Kazunori
AU - Kamataki, Kunihiro
AU - Iwashita, Shinya
AU - Uchida, Giichiro
AU - Seo, Hyunwoong
AU - Itagaki, Naho
PY - 2014/1
Y1 - 2014/1
N2 - We propose a simple theoretical model that describes the correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas. The model predicts that the high density of nanoparticles brings about small mean size, narrow size dispersion, and sharp size slope on the large side of the size distribution. The model suggests some methods of tuning the size dispersion, and it also suggests that a self-limiting process is the key to markedly suppressing fluctuations in nanostructure fabrication. All predictions coincide with the experimental results reported previously. Moreover, the model suggests that plasma fluctuation induces both the linear and nonlinear responses of nanoparticle growth.
AB - We propose a simple theoretical model that describes the correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas. The model predicts that the high density of nanoparticles brings about small mean size, narrow size dispersion, and sharp size slope on the large side of the size distribution. The model suggests some methods of tuning the size dispersion, and it also suggests that a self-limiting process is the key to markedly suppressing fluctuations in nanostructure fabrication. All predictions coincide with the experimental results reported previously. Moreover, the model suggests that plasma fluctuation induces both the linear and nonlinear responses of nanoparticle growth.
UR - http://www.scopus.com/inward/record.url?scp=84892388624&partnerID=8YFLogxK
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U2 - 10.7567/JJAP.53.010201
DO - 10.7567/JJAP.53.010201
M3 - Article
AN - SCOPUS:84892388624
SN - 0021-4922
VL - 53
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 1
M1 - 010201
ER -