Thermal conductivity and natural cooling rate of excimer-laser annealed Si: A molecular dynamics study

Byoung Min Lee, Back Seok Seong, Hong Koo Baik, Shinji Munetoh, Teruaki Motooka

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

To investigate the relationship between the thermal conductivity and the cooling rate, we have performed molecular-dynamics (MD) simulations based on a combination of the Langevin and Newton equations to deal with a heat transfer from l-Si to c-Si. The thermal conductivity of c-Si was measured by the direct method. In order to deal with finite-size effects, different cell sizes perpendicular to the direction of the heat current were used. The values of the thermal conductivity of 58 W/mK and 35.7 W/mK in the Tersoff potential were obtained at 1000 K and 1500 K, respectively. A MD cell with a length of 488.75 Å in the direction of a heat flow was used for estimating the natural cooling rate. The initial c/l interface systems were obtained by setting the temperatures of the MD cell at 1000 K and 1500 K, respectively, for Z ≤ 35 Å and 3800 K for Z > 35 Å. During the natural cooling processes, the temperature of the bottom 10 Å of the MD cell was controlled. The cooling rates of 7.4×1011 K/sec for 1000 K and 5.9×1011 K/sec for 1500 K were obtained, respectively.

元の言語英語
ホスト出版物のタイトルAmorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006
ページ111-116
ページ数6
出版物ステータス出版済み - 6 12 2007
イベント2006 MRS Spring Meeting - San Francisco, CA, 米国
継続期間: 4 18 20064 20 2006

出版物シリーズ

名前Materials Research Society Symposium Proceedings
910
ISSN(印刷物)0272-9172

その他

その他2006 MRS Spring Meeting
米国
San Francisco, CA
期間4/18/064/20/06

Fingerprint

Excimer lasers
excimer lasers
Molecular dynamics
Thermal conductivity
thermal conductivity
molecular dynamics
Cooling
cooling
cells
Heat transfer
heat transmission
newton
estimating
heat transfer
heat
Temperature
temperature
Computer simulation
simulation
Direction compound

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

これを引用

Lee, B. M., Seong, B. S., Baik, H. K., Munetoh, S., & Motooka, T. (2007). Thermal conductivity and natural cooling rate of excimer-laser annealed Si: A molecular dynamics study. : Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006 (pp. 111-116). (Materials Research Society Symposium Proceedings; 巻数 910).

Thermal conductivity and natural cooling rate of excimer-laser annealed Si : A molecular dynamics study. / Lee, Byoung Min; Seong, Back Seok; Baik, Hong Koo; Munetoh, Shinji; Motooka, Teruaki.

Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006. 2007. p. 111-116 (Materials Research Society Symposium Proceedings; 巻 910).

研究成果: 著書/レポートタイプへの貢献会議での発言

Lee, BM, Seong, BS, Baik, HK, Munetoh, S & Motooka, T 2007, Thermal conductivity and natural cooling rate of excimer-laser annealed Si: A molecular dynamics study. : Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006. Materials Research Society Symposium Proceedings, 巻. 910, pp. 111-116, 2006 MRS Spring Meeting, San Francisco, CA, 米国, 4/18/06.
Lee BM, Seong BS, Baik HK, Munetoh S, Motooka T. Thermal conductivity and natural cooling rate of excimer-laser annealed Si: A molecular dynamics study. : Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006. 2007. p. 111-116. (Materials Research Society Symposium Proceedings).
Lee, Byoung Min ; Seong, Back Seok ; Baik, Hong Koo ; Munetoh, Shinji ; Motooka, Teruaki. / Thermal conductivity and natural cooling rate of excimer-laser annealed Si : A molecular dynamics study. Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006. 2007. pp. 111-116 (Materials Research Society Symposium Proceedings).
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