Thermal conductivity measurement of indium-gallium-zinc-oxide thin films utilizing three-omega method

Rauf Khan, Shim Chang-Hoon, Reiji Hattori

研究成果: ジャーナルへの寄稿会議記事査読

抄録

The temperature dependence of cross-plane thermal conductivity of Indium-Gallium-Zinc-Oxide (IGZO) thin film was measured using a differential three-omega method. The IGZO thin films were deposited on Al2O3 substrate by DC sputtering in room temperature. The thermal conductivities were observed to be 1.6, 1.8 and 2.6 W/(m·K) at some different oxygen partial pressures, 0%, 10%, and 65%, respectively. Furthermore, the thermal conductivity of IGZO thin film is decreasing with increasing the measurement ambient temperature according to the crystalline material typical characteristics. These results notify that a crystallinity exists inside the IGZO films and this crystalline phase governs the heat conduction into IGZO films.

本文言語英語
ページ(範囲)1365-1368
ページ数4
ジャーナルDigest of Technical Papers - SID International Symposium
51
1
DOI
出版ステータス出版済み - 2020
イベント57th SID International Symposium, Seminar and Exhibition, Display Week, 2020 - Virtual, Online
継続期間: 8月 3 20208月 7 2020

!!!All Science Journal Classification (ASJC) codes

  • 工学(全般)

フィンガープリント

「Thermal conductivity measurement of indium-gallium-zinc-oxide thin films utilizing three-omega method」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル