Thermal conductivity of nano-crystallized indium-gallium-zinc oxide thin films determined by differential three-omega method

Rauf Khan, Michitaka Ohtaki, Satoshi Hata, Koji Miyazaki, Reiji Hattori

研究成果: Contribution to journalArticle査読

抄録

The temperature dependence thermal conductivity of the indium-gallium-zinc oxide (IGZO) thin films was investigated with the differential three-omega method for the clear demonstration of nanocrystallinity. The thin films were deposited on an alumina (α-Al2O3 ) substrate by direct current (DC) magnetron sputtering at different oxygen partial pressures ([PO2 ] = 0%, 10%, and 65%). Their thermal conductivities at room temperature were measured to be 1.65, 1.76, and 2.58 Wm−1K−1, respectively. The thermal conductivities decreased with an increase in the ambient measurement temperature. This thermal property is similar to that of crystalline materials. Electron microscopy observations revealed the presence of nanocrystals embedded in the amorphous matrix of the IGZO films. The typical size of the nanocrystals was approximately 2–5 nm with the lattice distance of about 0.24–0.26 nm. These experimental results indicate that the nanocrystalline microstructure controls the heat conduction in the IGZO films.

本文言語英語
論文番号1547
ジャーナルNanomaterials
11
6
DOI
出版ステータス出版済み - 6 2021

All Science Journal Classification (ASJC) codes

  • 化学工学(全般)
  • 材料科学(全般)

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