Thermal conductivity of ultrananocrystalline diamond/hydrogenated amorphous carbon composite films prepared by coaxial arc plasma deposition

S. Takeichi, Takashi Nishiyama, M. Tabara, S. Kawawaki, M. Kohno, K. Takahashi, T. Yoshitake

研究成果: 著書/レポートタイプへの貢献会議での発言

1 引用 (Scopus)

抜粋

The thermal conductivity of ultrananocrystalline diamond/hydrogenated amorphous carbon composite films prepared by coaxial arc plasma deposition (CAPD) was measured by a timedomain thermoreflactance method. The specific heat and density of the films were measured to be 0.891 J/gK and 1.70 g/cm3, respectively, as parameters for the estimation of the thermal conductivity. Based on them, the thermal conductivity was estimated to be 2.32 W/m-K. This value is smaller than that of general UNCD/a-C:H films prepared by chemical vapor deposition (CVD). It might be because the CAPD films possesses a huge number of grain boundaries owing to extremely small grains of approximately 2.3 nm as compared with those of CVD films and its structure enhances phonon scattering.

元の言語英語
ホスト出版物のタイトルCarbon Nanostructures
ホスト出版物のサブタイトルFrom Fundamental Studies to Applications and Devices
編集者R. B. Weisman, P. B. Atanassov, H. Imahori, S. V. Rotkin
出版者Electrochemical Society Inc.
ページ27-32
ページ数6
エディション25
ISBN(電子版)9781607685395
DOI
出版物ステータス出版済み - 1 1 2016
イベントSymposium on Carbon Nanostructures: From Fundamental Studies to Applications and Devices - PRiME 2016/230th ECS Meeting - Honolulu, 米国
継続期間: 10 2 201610 7 2016

出版物シリーズ

名前ECS Transactions
番号25
75
ISSN(印刷物)1938-6737
ISSN(電子版)1938-5862

その他

その他Symposium on Carbon Nanostructures: From Fundamental Studies to Applications and Devices - PRiME 2016/230th ECS Meeting
米国
Honolulu
期間10/2/1610/7/16

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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  • これを引用

    Takeichi, S., Nishiyama, T., Tabara, M., Kawawaki, S., Kohno, M., Takahashi, K., & Yoshitake, T. (2016). Thermal conductivity of ultrananocrystalline diamond/hydrogenated amorphous carbon composite films prepared by coaxial arc plasma deposition. : R. B. Weisman, P. B. Atanassov, H. Imahori, & S. V. Rotkin (版), Carbon Nanostructures: From Fundamental Studies to Applications and Devices (25 版, pp. 27-32). (ECS Transactions; 巻数 75, 番号 25). Electrochemical Society Inc.. https://doi.org/10.1149/07525.0027ecst