Thermal Oxidation of GaP

Yoshimine Kato, K. M. Geib, R. G. Gann, P. R. Brusenback, C. W. Wilmsen

研究成果: ジャーナルへの寄稿記事

6 引用 (Scopus)

抄録

The surface topography and interface structure after thermal oxidation of GaP is reported for the temperature range 600 to 1220 °C. An extensive network of interfacial voids was observed in the substrate under the oxide film. The size of the voids was enlarged by a bulging of the oxide, probably as a result of pressure within the voids but also from a difference in the coefficients of expansion which also caused cracks in the oxide film. The voids begin as isolated cavities but coalesce into winding caverns after further oxidation or with increased temperature. The oxide begins to grow a significant thickness of oxide at approximately 650 °C in dry oxygen. In steam the oxidation rate is approximately ten times faster and there are no interfacial voids even after 2 μ of oxide growth.

元の言語英語
ページ(範囲)588-592
ページ数5
ジャーナルJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
2
発行部数2
DOI
出版物ステータス出版済み - 1 1 1984

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Oxides
voids
Oxidation
oxidation
oxides
Oxide films
oxide films
bulging
Steam
Surface topography
steam
Oxygen
Cracks
topography
Temperature
cracks
Hot Temperature
Substrates
cavities
expansion

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

これを引用

Kato, Y., Geib, K. M., Gann, R. G., Brusenback, P. R., & Wilmsen, C. W. (1984). Thermal Oxidation of GaP. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2(2), 588-592. https://doi.org/10.1116/1.572451

Thermal Oxidation of GaP. / Kato, Yoshimine; Geib, K. M.; Gann, R. G.; Brusenback, P. R.; Wilmsen, C. W.

:: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 巻 2, 番号 2, 01.01.1984, p. 588-592.

研究成果: ジャーナルへの寄稿記事

Kato, Y, Geib, KM, Gann, RG, Brusenback, PR & Wilmsen, CW 1984, 'Thermal Oxidation of GaP', Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 巻. 2, 番号 2, pp. 588-592. https://doi.org/10.1116/1.572451
Kato, Yoshimine ; Geib, K. M. ; Gann, R. G. ; Brusenback, P. R. ; Wilmsen, C. W. / Thermal Oxidation of GaP. :: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 1984 ; 巻 2, 番号 2. pp. 588-592.
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