Thermodynamic analysis of coherently grown GaAsN/Ge: Effects of different gaseous sources

Jun Kawano, Yoshihiro Kangawa, Tomoe Yayama, Koichi Kakimoto, Akinori Koukitu

研究成果: Contribution to journalArticle査読


Thermodynamic analysis of coherently grown GaAs1-xNx on Ge with low N content was performed to determine the relationship between solid composition and growth conditions. In this study, a new algorithm for the simulation code, which is applicable to wider combinations of gaseous sources than the traditional algorithm, was developed to determine the influence of different gaseous sources on N incorporation. Using this code here we successfully compared two cases: one is a system using trimethylgallium (TMG), AsH3, and NH3, and the other uses dimethylhydrazine (DMHy) instead of NH3. It was found that the optimal N/As ratio of input gas in the system using DMHy was much lower than that using NH3. This shows that the newly developed algorithm could be a useful tool for analyzing the N incorporation during the vapor growth of GaAs1-xNx.

ジャーナルJapanese journal of applied physics
4 PART 1
出版ステータス出版済み - 4 2013

All Science Journal Classification (ASJC) codes

  • 工学(全般)
  • 物理学および天文学(全般)


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