In this paper, we use thermodynamic analysis to determine how the nitrogen (N) ratio in the source gases affects the solid composition of coherently grown GaAs1-xNx(x∼0.03). The source gases for Ga, As, and N are trimethylgallium ((CH3)3Ga), arsine (AsH3), and ammonia (NH3), respectively. The growth occurs on a Ge substrate, and the analysis includes the stress from the substratecrystal lattice mismatch. Calculation results indicate that to have just a few percent N incorporation into the grown solid, the V/III ratio in the source gases should be several thousands and the input-gas partial-pressure ratio NH 3/(NH3AsH3) should exceed 0.99. We also find that the lattice mismatch stress from the Ge substrate increases the V/III sourcegas ratio required for stable growth, whereas an increase in input Ga partial pressure ratio has the opposite effect.
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