Thermoelectric gas sensors of different catalyst oxides and heater metals

W. Shin, M. Nishibori, N. Izu, T. Itoh, I. Matsubara, N. Watanabe, T. Kasuga

研究成果: ジャーナルへの寄稿Conference article

2 引用 (Scopus)

抄録

Thermoelectric hydrogen sensors with different catalyst oxides, Pt-Al 2O3 and Pt-CeO2 have been prepared, and their gas sensing properties are investigated in the air and N2 flow. In air, the relationship between the sensor output and the gas concentration is a linear indicating the combustion only depends on the gas concentration in air. In N2 atmosphere, where the oxygen gas content of N2 source cylinder is below the industrial standard of 50 ppm, the sensor output shows also a linear relationship with the gas concentration, but depressed signal level. The microheater of the thermoelectric sensor has been prepared by the co-sputtering of tungsten and platinum to enhance the high temperature stability. The temperature coefficients of the Pt-W alloy multilayer heater were lowered to a half of the level of Pt.

元の言語英語
記事番号212010
ジャーナルIOP Conference Series: Materials Science and Engineering
18
発行部数SYMPOSIUM 15
DOI
出版物ステータス出版済み - 8 31 2011
イベント3rd International Congress on Ceramics, ICC3 - Osaka, 日本
継続期間: 11 14 201011 18 2010

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Chemical sensors
Oxides
Gases
Metals
Catalysts
Sensors
Air
Tungsten
Platinum
Sputtering
Hydrogen
Multilayers
Oxygen
Temperature

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Engineering(all)

これを引用

Thermoelectric gas sensors of different catalyst oxides and heater metals. / Shin, W.; Nishibori, M.; Izu, N.; Itoh, T.; Matsubara, I.; Watanabe, N.; Kasuga, T.

:: IOP Conference Series: Materials Science and Engineering, 巻 18, 番号 SYMPOSIUM 15, 212010, 31.08.2011.

研究成果: ジャーナルへの寄稿Conference article

Shin, W. ; Nishibori, M. ; Izu, N. ; Itoh, T. ; Matsubara, I. ; Watanabe, N. ; Kasuga, T. / Thermoelectric gas sensors of different catalyst oxides and heater metals. :: IOP Conference Series: Materials Science and Engineering. 2011 ; 巻 18, 番号 SYMPOSIUM 15.
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AU - Shin, W.

AU - Nishibori, M.

AU - Izu, N.

AU - Itoh, T.

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AU - Watanabe, N.

AU - Kasuga, T.

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