Thermoelectric gas sensors of different catalyst oxides and heater metals

W. Shin, M. Nishibori, N. Izu, T. Itoh, I. Matsubara, N. Watanabe, T. Kasuga

研究成果: Contribution to journalConference article査読

2 被引用数 (Scopus)

抄録

Thermoelectric hydrogen sensors with different catalyst oxides, Pt-Al 2O3 and Pt-CeO2 have been prepared, and their gas sensing properties are investigated in the air and N2 flow. In air, the relationship between the sensor output and the gas concentration is a linear indicating the combustion only depends on the gas concentration in air. In N2 atmosphere, where the oxygen gas content of N2 source cylinder is below the industrial standard of 50 ppm, the sensor output shows also a linear relationship with the gas concentration, but depressed signal level. The microheater of the thermoelectric sensor has been prepared by the co-sputtering of tungsten and platinum to enhance the high temperature stability. The temperature coefficients of the Pt-W alloy multilayer heater were lowered to a half of the level of Pt.

本文言語英語
論文番号212010
ジャーナルIOP Conference Series: Materials Science and Engineering
18
SYMPOSIUM 15
DOI
出版ステータス出版済み - 8 31 2011
外部発表はい
イベント3rd International Congress on Ceramics, ICC3 - Osaka, 日本
継続期間: 11 14 201011 18 2010

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Engineering(all)

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