Thermoelectric Infrared Sensors with High Responsivity for Automotive Applications

masaki Hirota, Fuminori Satou, Shinichi Morita

研究成果: ジャーナルへの寄稿記事

抄録

This paper presents the structure and fabrication process of a thermoelectric infrared sensor that provides high responsivity and a low cost potential. The processes for obtaining a precisely patterned Au-black infrared absorbing layer and reducing the internal stress of the Si3N4„ layer deposited by LP-CVD achieve both high responsivity and an excellent time constant A prototype sensor, having external dimensions of 160 µmx 160 µm and six pairs of thermopiles, achieved responsivity of 2100 VAV and a time constant of 25 msec at a pressure of 7.33 Pa. This performance is suitable for automotive appEcations.

元の言語英語
ページ(範囲)325-330
ページ数6
ジャーナルIEEJ Transactions on Sensors and Micromachines
121
発行部数6
DOI
出版物ステータス出版済み - 1 1 2001

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Thermopiles
Infrared radiation
Sensors
Chemical vapor deposition
Residual stresses
Fabrication
Costs

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering

これを引用

Thermoelectric Infrared Sensors with High Responsivity for Automotive Applications. / Hirota, masaki; Satou, Fuminori; Morita, Shinichi.

:: IEEJ Transactions on Sensors and Micromachines, 巻 121, 番号 6, 01.01.2001, p. 325-330.

研究成果: ジャーナルへの寄稿記事

@article{91970fc45f344e5c94e655f97bfe7a8c,
title = "Thermoelectric Infrared Sensors with High Responsivity for Automotive Applications",
abstract = "This paper presents the structure and fabrication process of a thermoelectric infrared sensor that provides high responsivity and a low cost potential. The processes for obtaining a precisely patterned Au-black infrared absorbing layer and reducing the internal stress of the Si3N4„ layer deposited by LP-CVD achieve both high responsivity and an excellent time constant A prototype sensor, having external dimensions of 160 µmx 160 µm and six pairs of thermopiles, achieved responsivity of 2100 VAV and a time constant of 25 msec at a pressure of 7.33 Pa. This performance is suitable for automotive appEcations.",
author = "masaki Hirota and Fuminori Satou and Shinichi Morita",
year = "2001",
month = "1",
day = "1",
doi = "10.1541/ieejsmas.121.325",
language = "English",
volume = "121",
pages = "325--330",
journal = "IEEJ Transactions on Sensors and Micromachines",
issn = "1341-8939",
publisher = "The Institute of Electrical Engineers of Japan",
number = "6",

}

TY - JOUR

T1 - Thermoelectric Infrared Sensors with High Responsivity for Automotive Applications

AU - Hirota, masaki

AU - Satou, Fuminori

AU - Morita, Shinichi

PY - 2001/1/1

Y1 - 2001/1/1

N2 - This paper presents the structure and fabrication process of a thermoelectric infrared sensor that provides high responsivity and a low cost potential. The processes for obtaining a precisely patterned Au-black infrared absorbing layer and reducing the internal stress of the Si3N4„ layer deposited by LP-CVD achieve both high responsivity and an excellent time constant A prototype sensor, having external dimensions of 160 µmx 160 µm and six pairs of thermopiles, achieved responsivity of 2100 VAV and a time constant of 25 msec at a pressure of 7.33 Pa. This performance is suitable for automotive appEcations.

AB - This paper presents the structure and fabrication process of a thermoelectric infrared sensor that provides high responsivity and a low cost potential. The processes for obtaining a precisely patterned Au-black infrared absorbing layer and reducing the internal stress of the Si3N4„ layer deposited by LP-CVD achieve both high responsivity and an excellent time constant A prototype sensor, having external dimensions of 160 µmx 160 µm and six pairs of thermopiles, achieved responsivity of 2100 VAV and a time constant of 25 msec at a pressure of 7.33 Pa. This performance is suitable for automotive appEcations.

UR - http://www.scopus.com/inward/record.url?scp=85010162908&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85010162908&partnerID=8YFLogxK

U2 - 10.1541/ieejsmas.121.325

DO - 10.1541/ieejsmas.121.325

M3 - Article

VL - 121

SP - 325

EP - 330

JO - IEEJ Transactions on Sensors and Micromachines

JF - IEEJ Transactions on Sensors and Micromachines

SN - 1341-8939

IS - 6

ER -