TY - JOUR
T1 - Thermoelectric Infrared Sensors with High Responsivity for Automotive Applications
AU - Hirota, Masaki
AU - Satou, Fuminori
AU - Morita, Shinichi
PY - 2001
Y1 - 2001
N2 - This paper presents the structure and fabrication process of a thermoelectric infrared sensor that provides high responsivity and a low cost potential. The processes for obtaining a precisely patterned Au-black infrared absorbing layer and reducing the internal stress of the Si3N4„ layer deposited by LP-CVD achieve both high responsivity and an excellent time constant A prototype sensor, having external dimensions of 160 µmx 160 µm and six pairs of thermopiles, achieved responsivity of 2100 VAV and a time constant of 25 msec at a pressure of 7.33 Pa. This performance is suitable for automotive appEcations.
AB - This paper presents the structure and fabrication process of a thermoelectric infrared sensor that provides high responsivity and a low cost potential. The processes for obtaining a precisely patterned Au-black infrared absorbing layer and reducing the internal stress of the Si3N4„ layer deposited by LP-CVD achieve both high responsivity and an excellent time constant A prototype sensor, having external dimensions of 160 µmx 160 µm and six pairs of thermopiles, achieved responsivity of 2100 VAV and a time constant of 25 msec at a pressure of 7.33 Pa. This performance is suitable for automotive appEcations.
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U2 - 10.1541/ieejsmas.121.325
DO - 10.1541/ieejsmas.121.325
M3 - Article
AN - SCOPUS:85010162908
VL - 121
SP - 325
EP - 330
JO - IEEJ Transactions on Sensors and Micromachines
JF - IEEJ Transactions on Sensors and Micromachines
SN - 1341-8939
IS - 6
ER -