Thermoelectric Infrared Sensors with High Responsivity for Automotive Applications

Masaki Hirota, Fuminori Satou, Shinichi Morita

研究成果: ジャーナルへの寄稿学術誌査読

抄録

This paper presents the structure and fabrication process of a thermoelectric infrared sensor that provides high responsivity and a low cost potential. The processes for obtaining a precisely patterned Au-black infrared absorbing layer and reducing the internal stress of the Si3N4„ layer deposited by LP-CVD achieve both high responsivity and an excellent time constant A prototype sensor, having external dimensions of 160 µmx 160 µm and six pairs of thermopiles, achieved responsivity of 2100 VAV and a time constant of 25 msec at a pressure of 7.33 Pa. This performance is suitable for automotive appEcations.

本文言語英語
ページ(範囲)325-330
ページ数6
ジャーナルIEEJ Transactions on Sensors and Micromachines
121
6
DOI
出版ステータス出版済み - 2001
外部発表はい

!!!All Science Journal Classification (ASJC) codes

  • 機械工学
  • 電子工学および電気工学

フィンガープリント

「Thermoelectric Infrared Sensors with High Responsivity for Automotive Applications」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル