Thin CoSi_2 Formation on SiO_2 with Low-Energy Ion Irradiation

Atsushi Matsushita, Taizoh Sadoh, Toshio Tsurushima

研究成果: Contribution to journal › Article › 査読

本文言語	英語
ページ（範囲）	6117-6122
ページ数	6
ジャーナル	Japanese Journal of Applied Physics, Part 2: Letters
巻	37
号	11
出版ステータス	出版済み - 11 15 1998

文献へのアクセス

@article{9f84743649ed4ce2b76e3ed7ba8896b6,

title = "Thin CoSi_2 Formation on SiO_2 with Low-Energy Ion Irradiation",

author = "Atsushi Matsushita and Taizoh Sadoh and Toshio Tsurushima",

year = "1998",

month = nov,

day = "15",

language = "English",

volume = "37",

pages = "6117--6122",

journal = "Japanese Journal of Applied Physics, Part 2: Letters",

issn = "0021-4922",

publisher = "IOP Publishing Ltd.",

number = "11",

}