Thomson scattering diagnostic system for measurement of electron properties of processing plasmas

M. D. Bowden, Y. Goto, H. Yanaga, P. J.A. Howarth, K. Uchino, K. Muraoka

研究成果: Contribution to journalConference article査読

26 被引用数 (Scopus)

抄録

In recent years, the method of incoherent Thomson scattering has been used in the study of glow discharge plasmas to measure electron properties such as electron density and electron temperature. In this paper, we report the development of a Thomson scattering diagnostic system that is appropriate for measurements in glow discharges containing reactive chemical species. The new scattering system is based on a low-pulse-energy, high-repetition-rate YAG laser, a multipass cell for the laser beam, and an ICCD camera for simultaneous detection of the entire scattered spectrum. Measurements made in an electron cyclotron resonance plasma using the new system are presented. The lower detection limit of electron density is estimated to be 5×1016 m-3.

本文言語英語
ページ(範囲)203-209
ページ数7
ジャーナルPlasma Sources Science and Technology
8
2
DOI
出版ステータス出版済み - 5 1999
イベントProceedings of the 1998 14th Europhysics Conference on Atomic and Molecular Physics of Ionized Gases, ESCAMPIG-98 - Dublin, IRL
継続期間: 8 26 19988 29 1998

All Science Journal Classification (ASJC) codes

  • 凝縮系物理学

フィンガープリント

「Thomson scattering diagnostic system for measurement of electron properties of processing plasmas」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル