抄録
In recent years, the method of incoherent Thomson scattering has been used in the study of glow discharge plasmas to measure electron properties such as electron density and electron temperature. In this paper, we report the development of a Thomson scattering diagnostic system that is appropriate for measurements in glow discharges containing reactive chemical species. The new scattering system is based on a low-pulse-energy, high-repetition-rate YAG laser, a multipass cell for the laser beam, and an ICCD camera for simultaneous detection of the entire scattered spectrum. Measurements made in an electron cyclotron resonance plasma using the new system are presented. The lower detection limit of electron density is estimated to be 5×1016 m-3.
| 元の言語 | 英語 |
|---|---|
| ページ（範囲） | 203-209 |
| ページ数 | 7 |
| ジャーナル | Plasma Sources Science and Technology |
| 巻 | 8 |
| 発行部数 | 2 |
| DOI | |
| 出版物ステータス | 出版済み - 5 1 1999 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
これを引用
Thomson scattering diagnostic system for measurement of electron properties of processing plasmas. / Bowden, M. D.; Goto, Y.; Yanaga, H.; Howarth, P. J.A.; Uchino, Kiichiro; Muraoka, K.
：: Plasma Sources Science and Technology, 巻 8, 番号 2, 01.05.1999, p. 203-209.研究成果: ジャーナルへの寄稿 › 記事
}
TY - JOUR
T1 - Thomson scattering diagnostic system for measurement of electron properties of processing plasmas
AU - Bowden, M. D.
AU - Goto, Y.
AU - Yanaga, H.
AU - Howarth, P. J.A.
AU - Uchino, Kiichiro
AU - Muraoka, K.
PY - 1999/5/1
Y1 - 1999/5/1
N2 - In recent years, the method of incoherent Thomson scattering has been used in the study of glow discharge plasmas to measure electron properties such as electron density and electron temperature. In this paper, we report the development of a Thomson scattering diagnostic system that is appropriate for measurements in glow discharges containing reactive chemical species. The new scattering system is based on a low-pulse-energy, high-repetition-rate YAG laser, a multipass cell for the laser beam, and an ICCD camera for simultaneous detection of the entire scattered spectrum. Measurements made in an electron cyclotron resonance plasma using the new system are presented. The lower detection limit of electron density is estimated to be 5×1016 m-3.
AB - In recent years, the method of incoherent Thomson scattering has been used in the study of glow discharge plasmas to measure electron properties such as electron density and electron temperature. In this paper, we report the development of a Thomson scattering diagnostic system that is appropriate for measurements in glow discharges containing reactive chemical species. The new scattering system is based on a low-pulse-energy, high-repetition-rate YAG laser, a multipass cell for the laser beam, and an ICCD camera for simultaneous detection of the entire scattered spectrum. Measurements made in an electron cyclotron resonance plasma using the new system are presented. The lower detection limit of electron density is estimated to be 5×1016 m-3.
UR - http://www.scopus.com/inward/record.url?scp=0032679891&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0032679891&partnerID=8YFLogxK
U2 - 10.1088/0963-0252/8/2/002
DO - 10.1088/0963-0252/8/2/002
M3 - Article
AN - SCOPUS:0032679891
VL - 8
SP - 203
EP - 209
JO - Plasma Sources Science and Technology
JF - Plasma Sources Science and Technology
SN - 0963-0252
IS - 2
ER -