Thomson scattering diagnostics of discharge plasmas in an excimer laser

H. Yamakoshi, M. Kato, Y. Kubo, H. Enokizono, Kiichiro Uchino, K. Muraoka, Akihiko Takahashi, M. Maeda

研究成果: ジャーナルへの寄稿Conference article

抄録

The electron-velocity distribution function of the discharge plasma in a rare gas halide excimer laser was diagnosed by the Thomson scattering method. The measured electron-velocity distribution function shows that the predicted value by the calculation is accurate. Those results assure that the calculation method which is based on the kinetic calculation using the circuit equations, the Boltzmann equation and the rate equations is effective in the excimer laser simulation.

元の言語英語
ページ(範囲)119-122
ページ数4
ジャーナルProceedings of SPIE - The International Society for Optical Engineering
1397
発行部数pt 1
出版物ステータス出版済み - 1 1 1991
外部発表Yes
イベント8th International Symposium on Gas Flow and Chemical Lasers Part 1 (of 2) - Madrid, Spain
継続期間: 9 10 19909 14 1990

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Excimer Laser
Thomson scattering
Excimer lasers
excimer lasers
plasma jets
Diagnostics
Plasma
Scattering
Velocity Distribution
Velocity distribution
Plasmas
Distribution functions
Distribution Function
rare gas-halide lasers
velocity distribution
distribution functions
Electron
Noble Gases
Electrons
Boltzmann equation

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

これを引用

Yamakoshi, H., Kato, M., Kubo, Y., Enokizono, H., Uchino, K., Muraoka, K., ... Maeda, M. (1991). Thomson scattering diagnostics of discharge plasmas in an excimer laser. Proceedings of SPIE - The International Society for Optical Engineering, 1397(pt 1), 119-122.

Thomson scattering diagnostics of discharge plasmas in an excimer laser. / Yamakoshi, H.; Kato, M.; Kubo, Y.; Enokizono, H.; Uchino, Kiichiro; Muraoka, K.; Takahashi, Akihiko; Maeda, M.

:: Proceedings of SPIE - The International Society for Optical Engineering, 巻 1397, 番号 pt 1, 01.01.1991, p. 119-122.

研究成果: ジャーナルへの寄稿Conference article

Yamakoshi, H, Kato, M, Kubo, Y, Enokizono, H, Uchino, K, Muraoka, K, Takahashi, A & Maeda, M 1991, 'Thomson scattering diagnostics of discharge plasmas in an excimer laser', Proceedings of SPIE - The International Society for Optical Engineering, 巻. 1397, 番号 pt 1, pp. 119-122.
Yamakoshi, H. ; Kato, M. ; Kubo, Y. ; Enokizono, H. ; Uchino, Kiichiro ; Muraoka, K. ; Takahashi, Akihiko ; Maeda, M. / Thomson scattering diagnostics of discharge plasmas in an excimer laser. :: Proceedings of SPIE - The International Society for Optical Engineering. 1991 ; 巻 1397, 番号 pt 1. pp. 119-122.
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