Thomson scattering diagnostics of discharge plasmas in an excimer laser

H. Yamakoshi; M. Kato; Y. Kubo; H. Enokizono; K. Uchino; K. Muraoka; A. Takahashi; M. Maeda

Thomson scattering diagnostics of discharge plasmas in an excimer laser

H. Yamakoshi, M. Kato, Y. Kubo, H. Enokizono, K. Uchino, K. Muraoka, A. Takahashi, M. Maeda

研究成果: ジャーナルへの寄稿 › 会議記事 › 査読

抄録

The electron-velocity distribution function of the discharge plasma in a rare gas halide excimer laser was diagnosed by the Thomson scattering method. The measured electron-velocity distribution function shows that the predicted value by the calculation is accurate. Those results assure that the calculation method which is based on the kinetic calculation using the circuit equations, the Boltzmann equation and the rate equations is effective in the excimer laser simulation.

本文言語	英語
ページ（範囲）	119-122
ページ数	4
ジャーナル	Proceedings of SPIE - The International Society for Optical Engineering
巻	1397
号	pt 1
出版ステータス	出版済み - 1月 1 1991
外部発表	はい
イベント	8th International Symposium on Gas Flow and Chemical Lasers Part 1 (of 2) - Madrid, Spain 継続期間: 9月 10 1990 → 9月 14 1990

!!!All Science Journal Classification (ASJC) codes

電子材料、光学材料、および磁性材料
凝縮系物理学
コンピュータサイエンスの応用
応用数学
電子工学および電気工学

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引用スタイル

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title = "Thomson scattering diagnostics of discharge plasmas in an excimer laser",

abstract = "The electron-velocity distribution function of the discharge plasma in a rare gas halide excimer laser was diagnosed by the Thomson scattering method. The measured electron-velocity distribution function shows that the predicted value by the calculation is accurate. Those results assure that the calculation method which is based on the kinetic calculation using the circuit equations, the Boltzmann equation and the rate equations is effective in the excimer laser simulation.",

author = "H. Yamakoshi and M. Kato and Y. Kubo and H. Enokizono and K. Uchino and K. Muraoka and A. Takahashi and M. Maeda",

year = "1991",

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T1 - Thomson scattering diagnostics of discharge plasmas in an excimer laser

AU - Yamakoshi, H.

AU - Kato, M.

AU - Kubo, Y.

AU - Enokizono, H.

AU - Uchino, K.

AU - Muraoka, K.

AU - Takahashi, A.

AU - Maeda, M.

PY - 1991/1/1

Y1 - 1991/1/1

N2 - The electron-velocity distribution function of the discharge plasma in a rare gas halide excimer laser was diagnosed by the Thomson scattering method. The measured electron-velocity distribution function shows that the predicted value by the calculation is accurate. Those results assure that the calculation method which is based on the kinetic calculation using the circuit equations, the Boltzmann equation and the rate equations is effective in the excimer laser simulation.

AB - The electron-velocity distribution function of the discharge plasma in a rare gas halide excimer laser was diagnosed by the Thomson scattering method. The measured electron-velocity distribution function shows that the predicted value by the calculation is accurate. Those results assure that the calculation method which is based on the kinetic calculation using the circuit equations, the Boltzmann equation and the rate equations is effective in the excimer laser simulation.

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M3 - Conference article

AN - SCOPUS:0025791822

VL - 1397

SP - 119

EP - 122

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

IS - pt 1

T2 - 8th International Symposium on Gas Flow and Chemical Lasers Part 1 (of 2)

Y2 - 10 September 1990 through 14 September 1990

ER -

Thomson scattering diagnostics of discharge plasmas in an excimer laser

抄録

!!!All Science Journal Classification (ASJC) codes

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