Thomson scattering diagnostics of discharge plasmas in an excimer laser

H. Yamakoshi, M. Kato, Y. Kubo, H. Enokizono, K. Uchino, K. Muraoka, A. Takahashi, M. Maeda

研究成果: Contribution to journalConference article査読

抄録

The electron-velocity distribution function of the discharge plasma in a rare gas halide excimer laser was diagnosed by the Thomson scattering method. The measured electron-velocity distribution function shows that the predicted value by the calculation is accurate. Those results assure that the calculation method which is based on the kinetic calculation using the circuit equations, the Boltzmann equation and the rate equations is effective in the excimer laser simulation.

本文言語英語
ページ(範囲)119-122
ページ数4
ジャーナルProceedings of SPIE - The International Society for Optical Engineering
1397
pt 1
出版ステータス出版済み - 1 1 1991
外部発表はい
イベント8th International Symposium on Gas Flow and Chemical Lasers Part 1 (of 2) - Madrid, Spain
継続期間: 9 10 19909 14 1990

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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