抄録
The electron-velocity distribution function of the discharge plasma in a rare gas halide excimer laser was diagnosed by the Thomson scattering method. The measured electron-velocity distribution function shows that the predicted value by the calculation is accurate. Those results assure that the calculation method which is based on the kinetic calculation using the circuit equations, the Boltzmann equation and the rate equations is effective in the excimer laser simulation.
| 元の言語 | 英語 |
|---|---|
| ページ（範囲） | 119-122 |
| ページ数 | 4 |
| ジャーナル | Proceedings of SPIE - The International Society for Optical Engineering |
| 巻 | 1397 |
| 発行部数 | pt 1 |
| 出版物ステータス | 出版済み - 1 1 1991 |
| 外部発表 | Yes |
| イベント | 8th International Symposium on Gas Flow and Chemical Lasers Part 1 (of 2) - Madrid, Spain 継続期間: 9 10 1990 → 9 14 1990 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
これを引用
Thomson scattering diagnostics of discharge plasmas in an excimer laser. / Yamakoshi, H.; Kato, M.; Kubo, Y.; Enokizono, H.; Uchino, Kiichiro; Muraoka, K.; Takahashi, Akihiko; Maeda, M.
：: Proceedings of SPIE - The International Society for Optical Engineering, 巻 1397, 番号 pt 1, 01.01.1991, p. 119-122.研究成果: ジャーナルへの寄稿 › Conference article
}
TY - JOUR
T1 - Thomson scattering diagnostics of discharge plasmas in an excimer laser
AU - Yamakoshi, H.
AU - Kato, M.
AU - Kubo, Y.
AU - Enokizono, H.
AU - Uchino, Kiichiro
AU - Muraoka, K.
AU - Takahashi, Akihiko
AU - Maeda, M.
PY - 1991/1/1
Y1 - 1991/1/1
N2 - The electron-velocity distribution function of the discharge plasma in a rare gas halide excimer laser was diagnosed by the Thomson scattering method. The measured electron-velocity distribution function shows that the predicted value by the calculation is accurate. Those results assure that the calculation method which is based on the kinetic calculation using the circuit equations, the Boltzmann equation and the rate equations is effective in the excimer laser simulation.
AB - The electron-velocity distribution function of the discharge plasma in a rare gas halide excimer laser was diagnosed by the Thomson scattering method. The measured electron-velocity distribution function shows that the predicted value by the calculation is accurate. Those results assure that the calculation method which is based on the kinetic calculation using the circuit equations, the Boltzmann equation and the rate equations is effective in the excimer laser simulation.
UR - http://www.scopus.com/inward/record.url?scp=0025791822&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0025791822&partnerID=8YFLogxK
M3 - Conference article
AN - SCOPUS:0025791822
VL - 1397
SP - 119
EP - 122
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
SN - 0277-786X
IS - pt 1
ER -