Thomson scattering diagnostics of glow discharge plasmas produced in Raman active gases

Soushi Narishige, Shuichi Kitamura, Shuuji Sakemi, Kentaro Tomita, Kiichiro Uchino, Katsunori Muraoka, Tadanori Sakoda

研究成果: ジャーナルへの寄稿レター

3 引用 (Scopus)

抄録

In Thomson scattering measurements of processing plasmas, rotational Raman scattering light from molecules sometimes overlaps the observed spectra. In order to solve this problem, a new method is proposed. This method involves separating the Thomson scattering component from the Raman scattering component by utilizing differences in the scattering characteristics depending on scattering wavelength and scattering geometry. By using this method, electron densities and electron temperatures of a microwave discharge plasma produced in a H2/CH4 gas mixture at a moderate pressure were successfully measured for the first time.

元の言語英語
ジャーナルJapanese Journal of Applied Physics, Part 2: Letters
41
発行部数11 A
出版物ステータス出版済み - 11 1 2002

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Thomson scattering
Glow discharges
glow discharges
Scattering
Plasmas
Gases
scattering
gases
Raman spectra
Raman scattering
plasma jets
gas mixtures
Plasma applications
electron energy
Electron temperature
microwaves
Gas mixtures
Discharge (fluid mechanics)
Carrier concentration
geometry

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

これを引用

Thomson scattering diagnostics of glow discharge plasmas produced in Raman active gases. / Narishige, Soushi; Kitamura, Shuichi; Sakemi, Shuuji; Tomita, Kentaro; Uchino, Kiichiro; Muraoka, Katsunori; Sakoda, Tadanori.

:: Japanese Journal of Applied Physics, Part 2: Letters, 巻 41, 番号 11 A, 01.11.2002.

研究成果: ジャーナルへの寄稿レター

Narishige, Soushi ; Kitamura, Shuichi ; Sakemi, Shuuji ; Tomita, Kentaro ; Uchino, Kiichiro ; Muraoka, Katsunori ; Sakoda, Tadanori. / Thomson scattering diagnostics of glow discharge plasmas produced in Raman active gases. :: Japanese Journal of Applied Physics, Part 2: Letters. 2002 ; 巻 41, 番号 11 A.
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AU - Sakemi, Shuuji

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AU - Uchino, Kiichiro

AU - Muraoka, Katsunori

AU - Sakoda, Tadanori

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