Thomson scattering diagnostics of glow discharge plasmas produced in Raman active gases

Soushi Narishige, Shuichi Kitamura, Shuuji Sakemi, Kentaro Tomita, Kiichiro Uchino, Katsunori Muraoka, Tadanori Sakoda

研究成果: Contribution to journalLetter査読

3 被引用数 (Scopus)

抄録

In Thomson scattering measurements of processing plasmas, rotational Raman scattering light from molecules sometimes overlaps the observed spectra. In order to solve this problem, a new method is proposed. This method involves separating the Thomson scattering component from the Raman scattering component by utilizing differences in the scattering characteristics depending on scattering wavelength and scattering geometry. By using this method, electron densities and electron temperatures of a microwave discharge plasma produced in a H2/CH4 gas mixture at a moderate pressure were successfully measured for the first time.

本文言語英語
ページ(範囲)L1259-L1262
ジャーナルJapanese Journal of Applied Physics, Part 2: Letters
41
11 A
DOI
出版ステータス出版済み - 11 1 2002

All Science Journal Classification (ASJC) codes

  • 工学(全般)
  • 物理学および天文学(その他)
  • 物理学および天文学(全般)

フィンガープリント

「Thomson scattering diagnostics of glow discharge plasmas produced in Raman active gases」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル