Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics

Saulius Juodkazis, Koichi Nishimura, Hiroki Okuno, Yusuke Tabuchi, Shigeki Matsuo, Tanaka Satoru, Hiroaki Misawa

研究成果: 著書/レポートタイプへの貢献会議での発言

6 引用 (Scopus)

抄録

We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.

元の言語英語
ホスト出版物のタイトルInternational Conference on Lasers, Applications, and Technologies 2007
ホスト出版物のサブタイトルLaser-assisted Micro- and Nanotechnologies
DOI
出版物ステータス出版済み - 11 26 2007
イベントInternational Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies - Minsk, ベラルーシ
継続期間: 5 28 20076 1 2007

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
6732
ISSN(印刷物)0277-786X

その他

その他International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies
ベラルーシ
Minsk
期間5/28/076/1/07

Fingerprint

Microfabrication
Ripple
ripples
Semiconductors
Metals
Semiconductor materials
Laser
Three-dimensional
Lasers
metals
raster scanning
lasers
Femtosecond Laser
Laser Scanning
Laser beam effects
Ultrashort pulses
Irradiation
Cross section
Enhancement
Scanning

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

これを引用

Juodkazis, S., Nishimura, K., Okuno, H., Tabuchi, Y., Matsuo, S., Satoru, T., & Misawa, H. (2007). Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. : International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies [67320B] (Proceedings of SPIE - The International Society for Optical Engineering; 巻数 6732). https://doi.org/10.1117/12.751889

Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. / Juodkazis, Saulius; Nishimura, Koichi; Okuno, Hiroki; Tabuchi, Yusuke; Matsuo, Shigeki; Satoru, Tanaka; Misawa, Hiroaki.

International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies. 2007. 67320B (Proceedings of SPIE - The International Society for Optical Engineering; 巻 6732).

研究成果: 著書/レポートタイプへの貢献会議での発言

Juodkazis, S, Nishimura, K, Okuno, H, Tabuchi, Y, Matsuo, S, Satoru, T & Misawa, H 2007, Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. : International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies., 67320B, Proceedings of SPIE - The International Society for Optical Engineering, 巻. 6732, International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies, Minsk, ベラルーシ, 5/28/07. https://doi.org/10.1117/12.751889
Juodkazis S, Nishimura K, Okuno H, Tabuchi Y, Matsuo S, Satoru T その他. Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. : International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies. 2007. 67320B. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.751889
Juodkazis, Saulius ; Nishimura, Koichi ; Okuno, Hiroki ; Tabuchi, Yusuke ; Matsuo, Shigeki ; Satoru, Tanaka ; Misawa, Hiroaki. / Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies. 2007. (Proceedings of SPIE - The International Society for Optical Engineering).
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