Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics

Saulius Juodkazis, Koichi Nishimura, Hiroki Okuno, Yusuke Tabuchi, Shigeki Matsuo, Satoru Tanaka, Hiroaki Misawa

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

6 被引用数 (Scopus)

抄録

We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.

本文言語英語
ホスト出版物のタイトルInternational Conference on Lasers, Applications, and Technologies 2007
ホスト出版物のサブタイトルLaser-assisted Micro- and Nanotechnologies
DOI
出版ステータス出版済み - 2007
イベントInternational Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies - Minsk, ベラルーシ
継続期間: 5 28 20076 1 2007

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
6732
ISSN(印刷版)0277-786X

その他

その他International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies
Countryベラルーシ
CityMinsk
Period5/28/076/1/07

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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