Time- and space-resolved electric potentials in a parallel-plate radio-frequency plasma

Kungen Teii, Michinobu Mizumura, Shousaka Matsumura, Shinriki Teii

研究成果: Contribution to journalArticle

8 引用 (Scopus)

抜粋

Time- and space-resolved electric potentials were investigated in a parallel-plate radio-frequency plasma. To investigate the electric potentials a low-input capacitance emissive probe heated by a CO2 laser was used. The analysis showed that the electric field in the cathode sheath region obtained by the probe method was in agreement with that by the laser optogalvanic spectroscopy.

元の言語英語
ページ(範囲)5888-5892
ページ数5
ジャーナルJournal of Applied Physics
93
発行部数10 1
DOI
出版物ステータス出版済み - 5 15 2003

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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