Time-resolved spatial profiles of electron density and temperature in hydrogen plasmas induced by radiation from laser-produced tin plasmas for extreme ultraviolet lithography light sources

Kouichiro Kouge, Kentaro Tomita, Junya Hotta, Yiming Pan, Hiroaki Tomuro, Masayuki Morita, Tatsuya Yanagida, Kiichiro Uchino, Naoji Yamamoto

研究成果: ジャーナルへの寄稿学術誌査読

1 被引用数 (Scopus)

抄録

We observed the spatial and temporal changes of the electron density (ne) and the electron temperature (Te) of hydrogen plasmas around a laser-produced Sn plasma EUV source. The plasma parameters were measured by the laser Thomson scattering (LTS) method. In the experiment, the Sn plasmas are produced in H2 gas at a pressure of 50-200 Pa and the hydrogen plasmas were induced by radiation from the Sn plasmas. The LTS measurements were performed at distances 30-90 mm away from the Sn plasmas. In all cases, the strong bremsstrahlung radiation of the Sn plasmas easily overwhelmed the weak LTS signals. To suppress noise due to the radiation, the solid angle of radiation from the Sn plasmas was restricted. The experimental results show that the ne was in the order of 1017 m-3 and Te was around 0.7 eV.

本文言語英語
論文番号066002
ジャーナルJapanese journal of applied physics
60
6
DOI
出版ステータス出版済み - 6月 2021

!!!All Science Journal Classification (ASJC) codes

  • 工学(全般)
  • 物理学および天文学(全般)

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