Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography

Yasuhiro Takaya; Masaki Michihata; Terutake Hayashi

doi:10.1109/ISOT.2014.55

Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi

加工プロセス

研究成果: Chapter in Book/Report/Conference proceeding › Conference contribution

抄録

In this study, the total angle resolved scattering (T-ARS) based on the light scattering method is suggested. To characterize surface areal-topography with nano-defects using the T-ARS method we have developed an automated 3D-scattering measurement system that enables to detect the scattered light from a super-smooth surface in total directions. In order to verify the feasibility of the T-ARS method, the analysis of surface areal-topography based on 3D light scattering measurement is performed using a platinum-coated glass lens mold with an ultra-fine finished surface.

本文言語	英語
ホスト出版物のタイトル	2014 International Symposium on Optomechatronic Technologies, ISOT 2014
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	200-204
ページ数	5
ISBN（電子版）	9781467367523
DOI	https://doi.org/10.1109/ISOT.2014.55
出版ステータス	出版済み - 1 1 2014
イベント	2014 International Symposium on Optomechatronic Technologies, ISOT 2014 - Seattle, 米国継続期間: 11 5 2014 → 11 7 2014

その他

その他	2014 International Symposium on Optomechatronic Technologies, ISOT 2014
国/地域	米国
City	Seattle
Period	11/5/14 → 11/7/14

All Science Journal Classification (ASJC) codes

機械工学
電子工学および電気工学

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10.1109/ISOT.2014.55

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引用スタイル

Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography. / Takaya, Yasuhiro; Michihata, Masaki; Hayashi, Terutake.

2014 International Symposium on Optomechatronic Technologies, ISOT 2014. Institute of Electrical and Electronics Engineers Inc., 2014. p. 200-204 7119419.

研究成果: Chapter in Book/Report/Conference proceeding › Conference contribution

Takaya, Y, Michihata, M & Hayashi, T 2014, Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography. in 2014 International Symposium on Optomechatronic Technologies, ISOT 2014., 7119419, Institute of Electrical and Electronics Engineers Inc., pp. 200-204, 2014 International Symposium on Optomechatronic Technologies, ISOT 2014, Seattle, 米国, 11/5/14. https://doi.org/10.1109/ISOT.2014.55

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abstract = "In this study, the total angle resolved scattering (T-ARS) based on the light scattering method is suggested. To characterize surface areal-topography with nano-defects using the T-ARS method we have developed an automated 3D-scattering measurement system that enables to detect the scattered light from a super-smooth surface in total directions. In order to verify the feasibility of the T-ARS method, the analysis of surface areal-topography based on 3D light scattering measurement is performed using a platinum-coated glass lens mold with an ultra-fine finished surface.",

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AB - In this study, the total angle resolved scattering (T-ARS) based on the light scattering method is suggested. To characterize surface areal-topography with nano-defects using the T-ARS method we have developed an automated 3D-scattering measurement system that enables to detect the scattered light from a super-smooth surface in total directions. In order to verify the feasibility of the T-ARS method, the analysis of surface areal-topography based on 3D light scattering measurement is performed using a platinum-coated glass lens mold with an ultra-fine finished surface.

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Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography

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