抄録
In this study, the total angle resolved scattering (T-ARS) based on the light scattering method is suggested. To characterize surface areal-topography with nano-defects using the T-ARS method we have developed an automated 3D-scattering measurement system that enables to detect the scattered light from a super-smooth surface in total directions. In order to verify the feasibility of the T-ARS method, the analysis of surface areal-topography based on 3D light scattering measurement is performed using a platinum-coated glass lens mold with an ultra-fine finished surface.
本文言語 | 英語 |
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ホスト出版物のタイトル | 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 |
出版社 | Institute of Electrical and Electronics Engineers Inc. |
ページ | 200-204 |
ページ数 | 5 |
ISBN(電子版) | 9781467367523 |
DOI | |
出版ステータス | 出版済み - 1月 1 2014 |
イベント | 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 - Seattle, 米国 継続期間: 11月 5 2014 → 11月 7 2014 |
その他
その他 | 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 |
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国/地域 | 米国 |
City | Seattle |
Period | 11/5/14 → 11/7/14 |
!!!All Science Journal Classification (ASJC) codes
- 機械工学
- 電子工学および電気工学