抜粋
In this study, the total angle resolved scattering (T-ARS) based on the light scattering method is suggested. To characterize surface areal-topography with nano-defects using the T-ARS method we have developed an automated 3D-scattering measurement system that enables to detect the scattered light from a super-smooth surface in total directions. In order to verify the feasibility of the T-ARS method, the analysis of surface areal-topography based on 3D light scattering measurement is performed using a platinum-coated glass lens mold with an ultra-fine finished surface.
| 元の言語 | 英語 |
|---|---|
| ホスト出版物のタイトル | 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 |
| 出版者 | Institute of Electrical and Electronics Engineers Inc. |
| ページ | 200-204 |
| ページ数 | 5 |
| ISBN（電子版） | 9781467367523 |
| DOI | |
| 出版物ステータス | 出版済み - 1 1 2014 |
| イベント | 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 - Seattle, 米国 継続期間: 11 5 2014 → 11 7 2014 |
その他
| その他 | 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 |
|---|---|
| 国 | 米国 |
| 市 | Seattle |
| 期間 | 11/5/14 → 11/7/14 |
All Science Journal Classification (ASJC) codes
- Mechanical Engineering
- Electrical and Electronic Engineering
フィンガープリント Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。
これを引用
Takaya, Y., Michihata, M., & Hayashi, T. (2014). Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography. ： 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 (pp. 200-204). [7119419] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISOT.2014.55