Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

In this study, the total angle resolved scattering (T-ARS) based on the light scattering method is suggested. To characterize surface areal-topography with nano-defects using the T-ARS method we have developed an automated 3D-scattering measurement system that enables to detect the scattered light from a super-smooth surface in total directions. In order to verify the feasibility of the T-ARS method, the analysis of surface areal-topography based on 3D light scattering measurement is performed using a platinum-coated glass lens mold with an ultra-fine finished surface.

元の言語英語
ホスト出版物のタイトル2014 International Symposium on Optomechatronic Technologies, ISOT 2014
出版者Institute of Electrical and Electronics Engineers Inc.
ページ200-204
ページ数5
ISBN(電子版)9781467367523
DOI
出版物ステータス出版済み - 1 1 2014
イベント2014 International Symposium on Optomechatronic Technologies, ISOT 2014 - Seattle, 米国
継続期間: 11 5 201411 7 2014

その他

その他2014 International Symposium on Optomechatronic Technologies, ISOT 2014
米国
Seattle
期間11/5/1411/7/14

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Surface topography
Scattering
Light scattering
Platinum
Lenses
Glass
Defects

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering

これを引用

Takaya, Y., Michihata, M., & Hayashi, T. (2014). Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography. : 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 (pp. 200-204). [7119419] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISOT.2014.55

Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography. / Takaya, Yasuhiro; Michihata, Masaki; Hayashi, Terutake.

2014 International Symposium on Optomechatronic Technologies, ISOT 2014. Institute of Electrical and Electronics Engineers Inc., 2014. p. 200-204 7119419.

研究成果: 著書/レポートタイプへの貢献会議での発言

Takaya, Y, Michihata, M & Hayashi, T 2014, Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography. : 2014 International Symposium on Optomechatronic Technologies, ISOT 2014., 7119419, Institute of Electrical and Electronics Engineers Inc., pp. 200-204, 2014 International Symposium on Optomechatronic Technologies, ISOT 2014, Seattle, 米国, 11/5/14. https://doi.org/10.1109/ISOT.2014.55
Takaya Y, Michihata M, Hayashi T. Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography. : 2014 International Symposium on Optomechatronic Technologies, ISOT 2014. Institute of Electrical and Electronics Engineers Inc. 2014. p. 200-204. 7119419 https://doi.org/10.1109/ISOT.2014.55
Takaya, Yasuhiro ; Michihata, Masaki ; Hayashi, Terutake. / Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography. 2014 International Symposium on Optomechatronic Technologies, ISOT 2014. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 200-204
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