Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

In this study, the total angle resolved scattering (T-ARS) based on the light scattering method is suggested. To characterize surface areal-topography with nano-defects using the T-ARS method we have developed an automated 3D-scattering measurement system that enables to detect the scattered light from a super-smooth surface in total directions. In order to verify the feasibility of the T-ARS method, the analysis of surface areal-topography based on 3D light scattering measurement is performed using a platinum-coated glass lens mold with an ultra-fine finished surface.

本文言語英語
ホスト出版物のタイトル2014 International Symposium on Optomechatronic Technologies, ISOT 2014
出版社Institute of Electrical and Electronics Engineers Inc.
ページ200-204
ページ数5
ISBN(電子版)9781467367523
DOI
出版ステータス出版済み - 1 1 2014
イベント2014 International Symposium on Optomechatronic Technologies, ISOT 2014 - Seattle, 米国
継続期間: 11 5 201411 7 2014

その他

その他2014 International Symposium on Optomechatronic Technologies, ISOT 2014
国/地域米国
CitySeattle
Period11/5/1411/7/14

All Science Journal Classification (ASJC) codes

  • 機械工学
  • 電子工学および電気工学

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