抄録
In this study, the total angle resolved scattering (T-ARS) based on the light scattering method is suggested. To characterize surface areal-topography with nano-defects using the T-ARS method we have developed an automated 3D-scattering measurement system that enables to detect the scattered light from a super-smooth surface in total directions. In order to verify the feasibility of the T-ARS method, the analysis of surface areal-topography based on 3D light scattering measurement is performed using a platinum-coated glass lens mold with an ultra-fine finished surface.
| 元の言語 | 英語 |
|---|---|
| ホスト出版物のタイトル | 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 |
| 出版者 | Institute of Electrical and Electronics Engineers Inc. |
| ページ | 200-204 |
| ページ数 | 5 |
| ISBN（電子版） | 9781467367523 |
| DOI | |
| 出版物ステータス | 出版済み - 1 1 2014 |
| イベント | 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 - Seattle, 米国 継続期間: 11 5 2014 → 11 7 2014 |
その他
| その他 | 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 |
|---|---|
| 国 | 米国 |
| 市 | Seattle |
| 期間 | 11/5/14 → 11/7/14 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Mechanical Engineering
- Electrical and Electronic Engineering
これを引用
Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography. / Takaya, Yasuhiro; Michihata, Masaki; Hayashi, Terutake.
2014 International Symposium on Optomechatronic Technologies, ISOT 2014. Institute of Electrical and Electronics Engineers Inc., 2014. p. 200-204 7119419.研究成果: 著書/レポートタイプへの貢献 › 会議での発言
}
TY - GEN
T1 - Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography
AU - Takaya, Yasuhiro
AU - Michihata, Masaki
AU - Hayashi, Terutake
PY - 2014/1/1
Y1 - 2014/1/1
N2 - In this study, the total angle resolved scattering (T-ARS) based on the light scattering method is suggested. To characterize surface areal-topography with nano-defects using the T-ARS method we have developed an automated 3D-scattering measurement system that enables to detect the scattered light from a super-smooth surface in total directions. In order to verify the feasibility of the T-ARS method, the analysis of surface areal-topography based on 3D light scattering measurement is performed using a platinum-coated glass lens mold with an ultra-fine finished surface.
AB - In this study, the total angle resolved scattering (T-ARS) based on the light scattering method is suggested. To characterize surface areal-topography with nano-defects using the T-ARS method we have developed an automated 3D-scattering measurement system that enables to detect the scattered light from a super-smooth surface in total directions. In order to verify the feasibility of the T-ARS method, the analysis of surface areal-topography based on 3D light scattering measurement is performed using a platinum-coated glass lens mold with an ultra-fine finished surface.
UR - http://www.scopus.com/inward/record.url?scp=84988289859&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84988289859&partnerID=8YFLogxK
U2 - 10.1109/ISOT.2014.55
DO - 10.1109/ISOT.2014.55
M3 - Conference contribution
AN - SCOPUS:84988289859
SP - 200
EP - 204
BT - 2014 International Symposium on Optomechatronic Technologies, ISOT 2014
PB - Institute of Electrical and Electronics Engineers Inc.
ER -