Transient reflecting grating for sub-surface analysis: GHz ultrasonic and thermal spectroscopies and imaging

T. Sawada, A. Harata

研究成果: Contribution to journalArticle査読

19 被引用数 (Scopus)

抄録

Picosecond time-resolved Transient Reflecting Grating (TRG) measurements are demonstrated for GHz ultrasonic and thermal spectroscopies of thin films and sub-surface regions of sub-μm scale. The measurements should be tools for electrochemical interface monitoring and time-resolved imaging. Some results are presented to show ion-implantation-induced surface hardening and unusual heat-diffusion behavior near a silicon surface. A model describing potential dependence of TRG responses at an electrochemical interface is proposed. An image of photoexcited carrier density is compared with a thermal image for a He-ion-implanted silicon wafer to demonstrate the time-resolved imaging.

本文言語英語
ページ(範囲)263-268
ページ数6
ジャーナルApplied Physics A Materials Science & Processing
61
3
DOI
出版ステータス出版済み - 9 1 1995
外部発表はい

All Science Journal Classification (ASJC) codes

  • 化学 (全般)
  • 材料科学(全般)

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