Transmission electron diffraction analysis of crystallographic orientation of β-FeSi2 produced by sputtering on Si(001) substrate

Noriyuki Kuwano, Daigo Norizumi, Tomohiro Fukuyama, Masaru Itakura

研究成果: Contribution to journalArticle査読

4 被引用数 (Scopus)

抄録

A practical procedure to distinguish b- and c-axes of β-FeSi2 by a conventional transmission electron diffraction (TED) method has been demonstrated using β-FeSi2 formed on a Si substrate. The TED patterns for β-FeSi2 with the incidence of [010] and [001] are almost the same as in the zeroth-order Laue zone. However, they can be distinguished from each other by the arrangement of diffraction spots in the first-order Laue zone.

本文言語英語
ページ(範囲)86-87
ページ数2
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
42
1
DOI
出版ステータス出版済み - 1 2003

All Science Journal Classification (ASJC) codes

  • 工学(全般)
  • 物理学および天文学(全般)

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