Treatment of a perfluorocarbon using nonthermal plasma produced by atmospheric streamer corona discharge

Nobuya Hayashi; Saburoh Satoh

doi:10.1109/TPS.2005.845003

Treatment of a perfluorocarbon using nonthermal plasma produced by atmospheric streamer corona discharge

Nobuya Hayashi, Saburoh Satoh

研究成果: ジャーナルへの寄稿 › 学術誌 › 査読

5 被引用数 (Scopus)

抄録

A nonthermal plasma produced by streamer corona discharge at atmospheric pressure was investigated for the treatment of perfluorocarbon gas. The effectiveness of fluorocarbon treatment was investigated using mixture gases of Ar or N with CF₄. A maximum decomposition rate of 86% and a maximum energy efficiency of 0.6 g/kWh were achieved using the mixture gas of CF₄ (1%) and Ar (99%).

本文言語	英語
ページ（範囲）	274-275
ページ数	2
ジャーナル	IEEE Transactions on Plasma Science
巻	33
号	2 I
DOI	https://doi.org/10.1109/TPS.2005.845003
出版ステータス	出版済み - 4月 1 2005
外部発表	はい

!!!All Science Journal Classification (ASJC) codes

核物理学および高エネルギー物理学
凝縮系物理学

UN SDG

この成果は、次の持続可能な開発目標に貢献しています

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引用スタイル

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title = "Treatment of a perfluorocarbon using nonthermal plasma produced by atmospheric streamer corona discharge",

abstract = "A nonthermal plasma produced by streamer corona discharge at atmospheric pressure was investigated for the treatment of perfluorocarbon gas. The effectiveness of fluorocarbon treatment was investigated using mixture gases of Ar or N with CF4. A maximum decomposition rate of 86% and a maximum energy efficiency of 0.6 g/kWh were achieved using the mixture gas of CF4 (1%) and Ar (99%).",

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AU - Satoh, Saburoh

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N2 - A nonthermal plasma produced by streamer corona discharge at atmospheric pressure was investigated for the treatment of perfluorocarbon gas. The effectiveness of fluorocarbon treatment was investigated using mixture gases of Ar or N with CF4. A maximum decomposition rate of 86% and a maximum energy efficiency of 0.6 g/kWh were achieved using the mixture gas of CF4 (1%) and Ar (99%).

AB - A nonthermal plasma produced by streamer corona discharge at atmospheric pressure was investigated for the treatment of perfluorocarbon gas. The effectiveness of fluorocarbon treatment was investigated using mixture gases of Ar or N with CF4. A maximum decomposition rate of 86% and a maximum energy efficiency of 0.6 g/kWh were achieved using the mixture gas of CF4 (1%) and Ar (99%).

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JO - IEEE Transactions on Plasma Science

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Treatment of a perfluorocarbon using nonthermal plasma produced by atmospheric streamer corona discharge

抄録

!!!All Science Journal Classification (ASJC) codes

UN SDG

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