Treatment of fluorocarbon using nonthermal plasma produced by atmospheric discharge

Nobuya Hayashi, Kazuhiro Yamamoto, Satoshi Ihara, Masaki Kamatani, Saburoh Satoh, Chobei Yamabe

研究成果: Contribution to journalArticle査読

3 被引用数 (Scopus)

抄録

A nonthermal plasma produced by the streamer corona discharge at an atmospheric pressure was investigated for the treatment of fluorocarbon. The effective treatment of fluorocarbons was performed by controlling the discharge parameters of the plasma. The decomposition rate of fluorocarbon was investigated by varying (a) discharge modes, (b) dilution gases and (c) discharge characteristics, that is, applied voltage VA-K of the main discharge gap and its steepness dVA-K/dt. The maximum decomposition rate of 92% was achieved by the streamer corona discharge.

本文言語英語
ページ(範囲)5399-5403
ページ数5
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
41
8
DOI
出版ステータス出版済み - 8 2002
外部発表はい

All Science Journal Classification (ASJC) codes

  • 工学(全般)
  • 物理学および天文学(全般)

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