Ultra-high performance multi-turn TOF-SIMS system with a femto-second laser for post-ionization: Investigation of the performance in linear mode

Morio Ishihara, Shingo Ebata, Kousuke Kumondai, Ryo Mibuka, Kiichiro Uchino, Hisayoshi Yurimoto

研究成果: Contribution to journalArticle査読

9 被引用数 (Scopus)

抄録

The performance of a newly developed TOF-SIMS System with a femtosecond laser postionization and a multiturn mass spectrometer was investigated in linear mode. This system would be very effective for analyzing valuable material such as space samples. By using postionization the secondary ion signals of Ag were increased (up to 100 times), compared with the conventional TOF-SIMS experiments. The laser power dependence on the signal intensities was also investigated and it was confirmed that the signal intensities reached specific values above the specific laser power. Lateral resolution of the elemental map was calculated to be about 40 nm.

本文言語英語
ページ(範囲)1598-1602
ページ数5
ジャーナルSurface and Interface Analysis
42
10-11
DOI
出版ステータス出版済み - 10 2010

All Science Journal Classification (ASJC) codes

  • 化学 (全般)
  • 凝縮系物理学
  • 表面および界面
  • 表面、皮膜および薄膜
  • 材料化学

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