Ultra-High Sensitive Gas Detection Using Pulse-Driven MEMS Sensor Based on Tin Dioxide

Koichi Suematsu, Wataru Harano, Tokiharu Oyama, Nan Ma, Ken Watanabe, Kengo Shimanoe

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抜粋

Miniaturized semiconductor gas sensors composed of microheater and a sensor electrode allowed a rapid heater switching, pulse-driven operation. SnO2 nanoparticles was fabricated on the gas sensor device, and the sensor was driven during heater on phase at elevated temperature. Additionally, the gas was introducing into the sensing layer during heater off phase, cooling the sensing layer. On the basis of the behavior of the electrical resistance under pulse-driving, we determined the various types of sensor responses to improve the gas sensing characteristics. The gas sensitivity was drastically enhanced by pulse-driving mode, because utility factor of the pulse-driven sensor was higher than that of conventional sensor. Additionally, newly gas sensing definition also enhanced the gas selectivity, because gas accumulates in the sensing layer during heater off phase. Therefore, pulse-driving mode improved the ability of semiconductor gas sensors.

元の言語英語
ホスト出版物のタイトルISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings
出版者Institute of Electrical and Electronics Engineers Inc.
ISBN(電子版)9781538683279
DOI
出版物ステータス出版済み - 5 2019
イベント18th International Symposium on Olfaction and Electronic Nose, ISOEN 2019 - Fukuoka, 日本
継続期間: 5 26 20195 29 2019

出版物シリーズ

名前ISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings

会議

会議18th International Symposium on Olfaction and Electronic Nose, ISOEN 2019
日本
Fukuoka
期間5/26/195/29/19

All Science Journal Classification (ASJC) codes

  • Signal Processing
  • Instrumentation

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  • これを引用

    Suematsu, K., Harano, W., Oyama, T., Ma, N., Watanabe, K., & Shimanoe, K. (2019). Ultra-High Sensitive Gas Detection Using Pulse-Driven MEMS Sensor Based on Tin Dioxide. : ISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings [8823211] (ISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISOEN.2019.8823211