Ultrananocrystalline diamond prepared by pulsed laser deposition

Takeshi Hara, Tsuyoshi Yoshitake, Tomohito Fukugawa, Hironori Kubo, Masaru Itakura, Noriyuki Kuwano, Yoshitsugu Tomokiyo, Kunihito Nagayama

研究成果: Contribution to journalArticle査読

17 被引用数 (Scopus)

抄録

Ultrananocrystalline diamond (UNCD) and sp2 amorphous carbon composite thin films were grown on sapphire (0001) substrates heated to 550 °C in 4 Torr hydrogen by pulsed laser deposition (PLD) using a graphite target. Transmission electron microscopy revealed that the deposited films consisted of dense non-oriented UNCDs with diameters of approximately 5 nm. The central area of the film, corresponding to the plume center, shows the maximum film thickness and maximum density of UNCDs. In order to achieve UNCD growth by PLD, it is critical that highly energetic species arrive in high density at the substrate accompanied by sufficient ambient hydrogen.

本文言語英語
ページ(範囲)649-653
ページ数5
ジャーナルDiamond and Related Materials
15
4-8
DOI
出版ステータス出版済み - 4 2006

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 化学 (全般)
  • 機械工学
  • 材料化学
  • 電子工学および電気工学

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