Ultrananocrystalline diamond/hydrogenated amorphous carbon films prepared by a coaxial arc plasma gun

You Nakagawa, Tsuyoshi Yoshitake, Kenji Hanada, Akira Nagano, Ryota Ohtani, Kazushi Sumitani, Hiroyuki Setoyama, Eiichi Kobayashi, Masaaki Hirakawa, Koichi Yamaguchi, Naoki Tsukahara, Yoshiaki Agawa, Kunihito Nagayama

    研究成果: 書籍/レポート タイプへの寄稿会議への寄与

    2 被引用数 (Scopus)

    抄録

    Growth of ultrananocrystalline diamond (UNCD)/hydrogenated amorphous carbon (a-C:H) composite films without initial nucleation was realized by an coaxial arc plasma gun at a substrate-temperature of 550 °C and hydrogen-atmosphere of 53.3 Pa. The pulsed arc discharge was triggered at a repetition rate of 1 Hz. The deposition rate was 80 nm/min. X-ray diffraction measurements with 12-keV X-rays from synchrotron radiation indicated extremely broad rings from diamond and none from graphite. The UNCD crystallite diameters were estimated to be approximately 1.3 nanometers by using Scherrer's equation. The sp 3/(sp2+sp3) was estimated to be approximately 57% from the X-ray photoemission spectroscopy. The coaxial arc plasma gun is a new powerful method that might enable us to realize the supersaturated condition with highly energetic ions for the growth of UNCD.

    本文言語英語
    ホスト出版物のタイトルTHERMEC 2009
    編集者Tara Chandra, Tara Chandra, Tara Chandra, N. Wanderka, N. Wanderka, N. Wanderka, Walter Reimers, Walter Reimers, Walter Reimers, M. Ionescu, M. Ionescu, M. Ionescu
    出版社Trans Tech Publications Ltd
    ページ2927-2932
    ページ数6
    ISBN(印刷版)0878492941, 9780878492947
    DOI
    出版ステータス出版済み - 2010
    イベント6th International Conference on Processing and Manufacturing of Advanced Materials - THERMEC'2009 - Berlin, ドイツ
    継続期間: 8月 25 20098月 29 2009

    出版物シリーズ

    名前Materials Science Forum
    638-642
    ISSN(印刷版)0255-5476
    ISSN(電子版)1662-9752

    その他

    その他6th International Conference on Processing and Manufacturing of Advanced Materials - THERMEC'2009
    国/地域ドイツ
    CityBerlin
    Period8/25/098/29/09

    !!!All Science Journal Classification (ASJC) codes

    • 材料科学(全般)
    • 凝縮系物理学
    • 材料力学
    • 機械工学

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