Unexpected and enhanced electrostatic adsorption capacity of oxygen vacancy-rich cobalt-doped In2O3 for high-sensitive MEMS toluene sensor

Tianshuang Wang, Siyu Liu, Peng Sun, Yanchao Wang, Kengo Shimanoe, Geyu Lu

研究成果: Contribution to journalArticle査読

1 被引用数 (Scopus)


Semiconductor metal oxide (SMO) gas sensor has been widely researched in artificial olfactory for monitoring gases and odor. However, realizing the characteristics of low detection limit, immunity from interference capacity and low operating temperature still remains challenge. Herein, the synthesis of hollow-porous cobalt-doped In2O3 sensing material with abundant surface oxygen vacancy (SOV) via one-pot and in-situ doping approach is reported. With their rich active sites, the Co-In2O3 exhibits unexpected and high electrostatic adsorption of toluene at 175 °C, which obviously inducing the charge carrier transport. Accordingly, the final Microelectro Mechanical Systems (MEMS) based Co-In2O3 gas sensor exhibits excellent selectivity and response, and toluene detection limits as low as 100 ppb at the lowest temperature so far. Density functional theory (DFT) calculations elucidated that the enhanced electrostatic adsorption is ascribed to the toluene preferentially bound to O3c atom site (bridging oxygen atom near SOV) on Co-In_b-D4 (110) surface, which will induce charge carrier accumulation layer and cause temperature-dependent abnormal pseudo p-type response. This work points out that the electrostatic adsorption derived from SOV could obviously modulate SMO sensing properties, and further supplements the defect engineering.

ジャーナルSensors and Actuators, B: Chemical
出版ステータス出版済み - 9 1 2021

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学
  • 材料化学


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